Hori Masaru | Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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概要
- 同名の論文著者
- Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univの論文著者
関連著者
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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Hiramatsu Mineo
Department Of Electrical And Electronic Engineering Meijo University
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後藤 俊夫
Imram Tohoku University
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Sekine Makoto
Department Of Electrical Engineering And Computer Science Nagoya University
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Kondo Hiroki
Deparment Of Physics Saga University
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堀 勝
名古屋大学大学院工学研究科電子情報システム専攻
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Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
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Hori Masaru
School Of Engineering Nagoya University
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Ikeda M
Tdk Electronic Device Business Group Akita Jpn
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ITO Masafumi
Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital
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Ito M
Wakayama Univ. Wakayama Jpn
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Ikeda M
Toshiba Corp. Kawasaki Jpn
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Ikeda Makoto
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Ikeda M
Sony Corporation Research Center
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Goto T
Graduate School Of Pharmaceutical Sciences Tohoku University
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Inayoshi Muneto
Department Of Quantum Engineering School Of Engineering Nagoya Univeristy
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Takahashi K
National Inst. Res. In Inorganic Materials Ibaraki Jpn
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Hori Masaru
Department Of Electrical Engineering And Computer Science Nagoya University
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Nagai Mikio
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Takahashi K
Department Of Physical Electronics Tokyo Institute Of Tecnology
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Kano Hiroyuki
Nu-ecoengineering Co. Ltd.
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Takahashi K
Tokyo Inst. Technol. Yokohama Jpn
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Takahashi Kuniharu
Graduate School Of Science And Technology Niigata University
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Takahashi Kouchiro
National Institute For Research In Inorganic Materials
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TAKAHASHI Kunimasa
Department of Quantum Engineering, School of Engineering, Nagoya Univeristy
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Hiramatsu Mineo
Nano Factory Department Of Electrical And Electronic Engineering Meijo University
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IKEDA Masanobu
Department of Quantum Engineering, School of Engineering, Nagoya University
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Ikeda Masanobu
Department Of Clinical Laboratories Saku Central Hospital
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KANO Hiroyuki
NU Eco-Engineering Co., Ltd.
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Ikeda M
Toshiba Corp. Yokohama Jpn
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Nagai Hisao
Department Of Chemistry College Of Humanities And Sciences Nihon University
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Ito Haruhiko
Nagoya Municipal Industrial Research Institute
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Ito Haruhiko
Nagoya Municipal Industrial Res. Inst.
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TAKEO Takashi
Nagoya Municipal Industrial Research Institute
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Den Shoji
Katagiri Engineering Co. Ltd.
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Tsukada T
Tdk Corp. Chiba Jpn
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Kato Takayoshi
Reseach Institute Of Electronics Shizuoka University
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Hori M
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Hiramatsu M
Nano Factory Graduate School Of Science And Technology Meijo University
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Kato T
Graduate School Of Engineering Nagoya University
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Fujita Kazushi
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Kato Takayoshi
Research Institute Of Electronics Shizuoka University
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INAYOSHI Muneto
Department of Quantum Engineering, School of Engineering, Nagoya University
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ITO Masafumi
Faculty of System Eng., Wakayama University
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ISHII Nobuo
Central Research Laboratory, Tokyo Electron Ltd.
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Koshikawa Takanori
Fundamental Electronics Research Institute Academic Frontier Promotion Center Osaka Electro-communic
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Kato T
Ashikaga Inst. Technol. Tochigi
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Kato T
Optoelectronics Technology Research Lab. Ibaraki
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Hiramatsu Makoto
Memory Products Business Promotion Center Canon Inc.
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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Ishida Tetsuro
Department Of Electronic Engineering Faculty Of Engineering Yamanashi University
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KISHIMOTO Shigeru
Department of Quantum Engineering, Nagoya University
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TAKEUCHI Wakana
Department of Electrical Engineering and Computer Science, Nagoya University
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Kato Terumasa
Nagoya Municipal Industrial Research Institute
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HAMAGAKI Manabu
The Institute of Physical and Chemical Research (RIKEN)
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Kishimoto Shigeru
Department Of Quantum Engineering School Of Engineering Nagoya University
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Kishimoto Shigeru
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Ohta Hiroyuki
Department Of Biological Sciences Graduate School Of Bioscience And Biotechnology Tokyo Institute Of
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TADA Shigekazu
Department of Quantum Engineering, Nagoya University
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Goto T
Department Of Quantum Engineering Nagoya University
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Hamagaki Manabu
The Institute Of Physical And Chemical Research
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Takeda Keigo
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Kondo T
Graduate School Of Science Nagoya University
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Takahashi Shunji
Katagiri Engineering Co. Ltd.
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Goto T
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ohta Hiroyuki
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Sakakibara T
Department Of Quantum Engineering Nagoya University
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Hori Masaru
Department Of Quantum Engineering School Of Engineering Nagoya University
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Takeuchi Wakana
Department Of Electrical Engineering And Computer Science Nagoya University
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NAKAMURA Masayuki
Department of Medical Simulation Engineering, Research Center for Nano Medical Engineering, Institut
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Takahashi K
Department Of Physical Electronics Tokyo Institute Of Technology
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Ishikawa Masayuki
Department of Applied Bioscience, Faculty of Agriculture, Hokkaido University
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Yamada Koji
Department Of Bioscience And Biotechnology Faculty Of Agriculture Kyushu University
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TAKAHASHI Kaoru
Department of Applied Physics, Tokyo University of Agriculture and Technology
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Tokuda Yutaka
Department Of Surgery Tokai University School Of Medicine
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Tokuda Yutaka
Department Of Electrical And Electronics Engineering Aichi Institute Of Technology
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Yamamoto Yasuo
Department Of Chemistry College Of Science Rikkyo University
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NAGAI Mikio
Department of Quantum Engineering, Nagoya University
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NAWATA Masahito
Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo Univer
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KAWAKAMI Satoru
Tokyo Electron AT Ltd.
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Hori Masaru
Department Of Electronical Engineering And Computer Science Graduate School Of Engineering Nagoya Un
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SEKINE Makoto
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya Un
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Miyata K
Kobe Steel Ltd. Kobe Jpn
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Ishii N
Central Research Laboratory Tokyo Electron Ltd.
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Ishii Nobuo
Corporate R&d Central Research Laboratory Tokyo Electron Ltd.
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Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Kano Hiroyuki
Graduate School Of Engineering Nagoya University
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URA Masato
Department of Electrical Engineering and Computer Science, Nagoya University
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Nawata M
Meijo Univ. Nagoya Jpn
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Nawata Masahito
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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NAGAI Hisao
Department of Quantum Engineering, Nagoya University
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Takahashi Kensuke
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Takahashi Kazuhiko
National Research Institute For Metals Tsukuba Laboratories:sanyo Elect. Co. Ltd.
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Kono Akihiro
Center for Cooperative Research in Advanced Science and Technology, Nagoya University
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Yamada K
Department Of Quantum Engineering Nagoya University
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Ishikawa M
Joint Research Center For Atom Technology(jrcat) Angstrom Technology Partnership
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Ura Masato
Department Of Electrical Engineering And Computer Science Nagoya University
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Nagai Hisao
Department Of Quantum Engineering Nagoya University
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Kono A
Nagoya Univ. Nagoya Jpn
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KATAGIRI Toshirou
Katagiri Engineering Co., Ltd.
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YAMAKAWA Koji
Katagiri Engineering Co., Ltd.
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Nakamura M
Research Institute For Electronic Science Hokkaido University
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Takahashi Kasuke
National Laboratory For High Energy Physics
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Tokuda Yutaka
Department Of Breast And Endocrine Surgery Tokai University School Of Medicine
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Yamakawa K
Department Of Quantum Engineering Nagoya University
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SUGANUMA Shinji
Department of Electronics, Faculty of Engineering, Nagoya University
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Hiramatsu M
Toshiba Corp. Yokohama Jpn
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Takahashi Katsuaki
Department Of Applied Chemistry Okayama University
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Nagashima Atsushi
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Nagashima Atsushi
Department Of Digestive Surgery And Surgical Oncology (surgery Ii) Yamaguchi University Graduate Sch
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Miyata Koji
Department Of Quantum Engineering School Of Engineering Nagoya University
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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TAKAI Osamu
EcoTopia Science Institute, Nagoya University
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KONDO Hiroki
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science School Of Engineering Nagoya University
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Kawaai Keigo
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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伊藤 昌文
名城大学理工学部
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Takai Osamu
Ecotopia Science Institute Nagoya University
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Maruyama Kenji
Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi
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Fujii Toshiaki
Department Of Computer Science Graduate School Of Engineering Nagoya University
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Zaima Shigeaki
Center For Cooperative Research In Advanced Science & Technology Nagoya University
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YAMAKAWA Koji
Department of Quantum Engineering, Nagoya University
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MIZUNO Etsuko
Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo Univer
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HIRAYA Atsunari
Institute for Molecular Science
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Yamamoto Y
College Of Engineering Hosei University
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NAGAO Hidetoshi
Nano Factory, Department of Materials Science and Engineering, Meijo University
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TANIGUCHI Masaki
Nano Factory, Department of Materials Science and Engineering, Meijo University
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AMANO Hiroshi
Nano Factory, Department of Materials Science and Engineering, Meijo University
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ANDO Yoshinori
Nano Factory, Department of Materials Science and Engineering, Meijo University
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NAGAO Hidetoshi
NanoFactory, Department of Materials Science and Engineering, Meijo University
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ANDO Yoshinori
NanoFactory, Department of Materials Science and Engineering, Meijo University
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Mizuno Etsuko
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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Matsushita Akio
Department Of Quantum Engineering Nagoya University
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OHTA Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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ISHIDA Tetsuro
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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TAKEDA Keigo
Department of Quantum Engineering, Nagoya University
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Yamamoto Yuichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Samukawa Seiji
Vlsi Development Div. Nec Corporation
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Kawakami Satoshi
Tokyo Electron At Ltd.
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ISEKI Sachiko
Department of Molecular Craniofacial Embryology, Tokyo Medical and Dental University
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MIYATA Koji
Department of Orthopaedic Surgery, Hokkaido University School of Medicine
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Yamamoto Y
Nippon Steel Corp. Kawasaki Jpn
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Hayashi Yuzo
Irie Koken Co. Ltd.
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OKAMOTO Hidekazu
Asahi Glass Co., Ltd.
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SHIRATANI Masaharu
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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NISHIZAWA Norihiko
Division of Advanced Science and Biotechnology, Graduate School of Engineering, Osaka University
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MOON Chang
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya Un
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SETSUHARA Yuichi
Joining and Welding Research Institute, Osaka University
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Yamamoto Y
Nara Inst. Sci. And Technol. Nara Jpn
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Shiratani Masaharu
Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U
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Ohta Takayuki
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ishida Tetsuro
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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HATTORI Hajime
Nagoya Municipal Industrial Research Institute
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MACHINO Takuma
Department of Electrical Engineering and Computer Science, Nagoya University
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Hiraya A
Institute For Molecular Science
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Teii Kungen
Department of Quantum Engineering, Nagoya University
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KONO Akihiro
CCRAST, Nagoya University
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Moon Chang
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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MAEDA Yoritsugu
Department of Quantum Engineering, Nogoya University
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Matsuyama Hiroki
Department Of Anesthesiology And Intensive Care Kyoto Prefectural University Of Medicine
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Nishizawa Norihiko
Department Of Quantum Engineering Nagoya University
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Yamamoto Yoshitugu
Department Of Chemistry For Materials Faculty Of Engineering Mie University
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Ito Masafumi
Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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Taniguchi Masaki
Nanofactory Department Of Materials Science And Engineering Meijo University
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AISO Kokichi
Department of Quantum Engineering, School of Engineering, Nagoya University
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Teii K
Kyushu Univ. Fukuoka Jpn
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Mori Takumi
Department Of Advanced Materials Science University Of Tokyo
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Kono Akihiro
Center For Cooperative Research In Advanced Science And Technology Nagoya University
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Aiso Kokichi
Department Of Quantum Engineering School Of Engineering Nagoya University
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Kondo Shingo
Department Of Electrical Engineering And Computer Science Nagoya University
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Koga Kazunori
Department Of Advanced Energy Engineering Sciences Interdisciplinary Graduate School Of Engineering
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Sekine Makoto
Nagoya Univ. Nagoya Jpn
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Kuroda Hiroki
Department Of Education (sciences) Shizuoka University
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Machino Takuma
Department Of Electrical Engineering And Computer Science Nagoya University
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Ohkura Hiroshi
Department Of Applied Physics Osaka City University
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Hattori H
Department Of Electrical And Electronics Engineering Sophia University
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MARUYAMA Koji
Department of Quantum Engineering, Nagoya University
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Yokoyama Yoshihiro
Department Of Advanced Energy Engineering Science Interdisciplinary Graduate School Of Engineering S
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TAKAHASHI Shunji
Katagiri Engineering Co., Ltd.
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NAKAYAMA Hirotaka
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Hara Yasuhiro
Research Center For Nanodevices And Systems Hiroshima University
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DEN Shoji
Department of Quantum Engineering, School of Engineering, Nagoya University
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Hashizume Hiroshi
Deparment Of Chemistry Shizuoka University
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Hori Masaru
Nagoya Univ. Nagoya Jpn
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Nakamura M
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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TAKASHIMA Seigou
Department of Quantum Engineering, Nagoya University
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Nakayama Hirotaka
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Goto Toshio
Department Of Quantum Engineering Nagoya University
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Abe Yusuke
Department Of Electrical Engineering And Computer Science Nagoya University
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Nishizawa Norihiko
Osaka Univ. Osaka Jpn
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Nagai Mikio
Nagoya Univ. Nagoya Jpn
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Nagai Mikio
Department Of Quantum Engineering School Of Engineering Nagoya University
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Kobayashi Shigeto
Department Of Internal Medicine And Rheumatology Juntendo University School Of Medicine
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MORIOKA Reiji
Department of Quantum Engineering, School of Engineering, Nagoya University
著作論文
- Diamond Film Formation by OH Radical Injection from Remote Microwave H_2/H_2O Plasma into Parallel-Plate RF Methanol Plasma
- High-Rate Anisotropic Ablation and Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Process
- Synthesis of Diamond Using RF Magnetron Methanol Plasma Chemical Vapor Deposition Assisted by Hydrogen Radical Injection
- Effects of Ar Dilution and Exciting Frequency on Absolute Density and Translational Temperature of Si Atom in Very High Frequency-Capacitively Coupled SiH_4 Plasmas
- Development of Compact C_2F_4 Gas Supply Equipment and Its Application to Etching of Dielectrics in an Environmental Benign Process
- Octave Spanning High Quality Super Continuum Generation Using 10nJ and 104fs High Energy Ultrashort Soliton Pulse
- Combinatorial Plasma Etching Process
- Synthesis of Platinum Nanoparticles on Two-Dimensional Carbon Nanostructures with an Ultrahigh Aspect Ratio Employing Supercritical Fluid Chemical Vapor Deposition Process
- Control of Electric Conduction of Carbon Nanowalls
- Electrical Characterization of Carbon Nanowalls
- High Performance of Silicon Oxide Selective Etching Using F_2 Gas and Graphite Instead of Perfluorinated Compound Gases
- Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma
- Behaviors of carbon atom density in hydrocarbon and fluorocarbon plasmas
- Measurement of Einstein's A Coefficient of the 296.7 nm Transition Line of the Carbon Atom
- Measurement of Carbon Atom Density in High Density Plasma Process
- Effects of Oxygen and Nitrogen Atoms on SiOCH Film Etching in Ultrahigh-Frequency Plasma
- Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N_2 and H_2 Gas Chemistry
- Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique
- CH_3 Radical Density in Electron Cyclotron Resonance CH_3OH and CH_3OH/H_2 Plasmas
- Evaluation of CF_2 Radical as a Precursor for Fluorocarbon Film Formation in Highly Selective SiO_2 Etching Process Using Radical Injection Technique
- CF_X (X=1-3) Radical Measurements in ECR Etching Plasma Employing C_4F_8 Gas by Infrared Diode Laser Absorption Spectroscopy
- Characteristics of Fluorocarbon Radicals and CHF_3 Molecule in CHF_3 Electron Cyclotron Resonance Downstream Plasma
- CF_X(X=1-3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film Deposition ( Plasma Processing)
- Cleaning of Glass Disk in Oxygen Plasma by Using Compact Electron-Beam-Excited Plasma Source
- Spatial distributions of electron, CF, and CF2 radical densities and gas temperature in DC-superposed dual-frequency capacitively coupled plasma etch reactor employing cyclic-C4F8/N2/Ar gas
- Atmospheric Pressure Fluorocarbon-Particle Plasma Chemical Vapor Deposition for Hydrophobic Film Coating
- Measurement of Spatial Distribution of SiF_4 and SiF_2 Densities in High Density SiF_4 Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Spatial Distribution Measurement of Absolute Densities of CF and CF_2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Critical Factors for Nucleation and Vertical Growth of Two Dimensional Nano-Graphene Sheets Employing a Novel Ar^+ Beam with Hydrogen and Fluorocarbon Radical Injection
- Effects of Dilution Gases on Si Atoms and SiHx^^+ (X = 0-3) Ions in Electron Cyclotron Resonance SiH_4 Plasmas
- Measurements of the CF, CF_2 and CF_3 Radicals in a CHF_3 Electron Cyclotron Resonance Plasma
- Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source
- Investigation of Nitrogen Atoms in Low-Pressure Nitrogen Plasmas Using a Compact Electron-Beam-Excited Plasma Source
- Measurement of Hydrogen Radical Density and Its Impact on Reduction of Copper Oxide in Atmospheric-Pressure Remote Plasma Using H2 and Ar Mixture Gases
- Surface Loss Probability of Nitrogen Atom on Stainless-Steel in N2 Plasma Afterglow
- Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4 Plasmas
- Control of Fluorocarbon Radicals by On-Off Modulated Electron Cyclotron Resonance Plasma
- Evaluation of Property Changes due to Radiation, Radicals, and Ions on Organic Low-$k$ Films in H2/N2 Plasma Etching
- Development of Compact C2F4 Gas Supply Equipment and Its Application to Etching of Dielectrics in an Environmental Benign Process
- Synthesis of Fluorinated SiN_x Gate Dielectric Films Using ECR-PECVD Employing SiF_4/N_2/H_2 Gases
- Ultrathin Fluorinated Silicon Nitride Gate Dielectric Films Formed by Plasma Enhanced Chemical Vapor Deposition Employing NH_3 and SiF_4
- Control of Ion Bombardment and Species for Ultra Low Temperature Formation of Silicon Nitride Gate Dielectric Films Using Plasma Chemical Vapor Deposition
- Contrast Enhancement of Wavelength-Selective Detection of Mid-Infrared Using Localized Atmospheric-Pressure Plasma Treatment
- Novel atmospheric pressure inductively coupled micro plasma source using floating wire electrode (Special issue: Plasma processing)
- Dependence of Surface-Loss Probability of Hydrogen Atom on Pressures in Very High Frequency Parallel-Plate Capacitively Coupled Plasma
- Effect of Low Level O2 Addition to N2 on Surface Cleaning by Nonequilibrium Atmospheric-Pressure Pulsed Remote Plasma
- Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Microplasma (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
- Temperature and Density of CF Radicals in 60 MHz Capacitively Coupled Fluorocarbon Gas Plasma
- Radical Behavior in Fluorocarbon Plasma and Control of Silicon Oxide Etching by Injection of Radicals
- Aligned Growth of Single-Walled and Double-Walled Carbon Nanotube Films by Control of Catalyst Preparation
- High-Rate Growth of Films of Dense, Aligned Double-Walled Carbon Nanotubes Using Microwave Plasma-Enhanced Chemical Vapor Deposition
- Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition
- Control of Super Hydrophobic and Super Hydrophilic Surfaces of Carbon Nanowalls Using Atmospheric Pressure Plasma Treatments (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
- Silicon Oxide Selective Etching Employing Dual Frequency Superimposed Magnetron Sputtering of Carbon Using F2/Ar Gases
- Inactivation of Penicillium digitatum Spores by a High-Density Ground-State Atomic Oxygen-Radical Source Employing an Atmospheric-Pressure Plasma
- Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source
- Ultrahigh-Speed Synthesis of Nanographene Using Alcohol In-Liquid Plasma
- Fabrication of Multilayered SiOCH Films with Low Dielectric Constant Employing Layer-by-Layer Process of Plasma Enhanced Chemical Vapor Deposition and Oxidation
- Feature Profiles on Plasma Etch of Organic Films by a Temporal Control of Radical Densities and Real-Time Monitoring of Substrate Temperature
- Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation
- Nucleation Control of Carbon Nanowalls Using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition
- Fabrication of Graphene-Based Films Using Microwave-Plasma-Enhanced Chemical Vapor Deposition
- Fabrication of Carbon Nanowalls on Carbon Fiber Paper for Fuel Cell Application
- High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism
- Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Selective Ashing of Resist Layer Combined with Ultraviolet Curing
- H2/N2 Plasma Etching Rate of Carbon Films Deposited by H-Assisted Plasma Chemical Vapor Deposition
- An Autonomously Controllable Plasma Etching System Based on Radical Monitoring
- Surface Modification Process of Contact Lens Using Three-Phase AC Excited Nonequilibrium Atmospheric Pressure Ar Plasma
- Novel Silicon Wafer Slicing Technology Using Atmospheric-Pressure Reactive Microplasma
- Growth and Energy Bandgap Formation of Silicon Nitride Films in Radical Nitridation
- Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma
- Wavelength Dependence of Photon-Induced Interface Defects in Hydrogenated Silicon Nitride/Si Structure during Plasma Etching Processes
- Inactivation Process of Penicillium digitatum Spores Treated with Non-equilibrium Atmospheric Pressure Plasma
- Supercritical Fluid Deposition of High-Density Nanoparticles of Photocatalytic TiO
- Roles of SiH3 and SiH2 Radicals in Particle Growth in rf Silane Plasmas
- Optical-Fiber-Type Broadband Cavity Ring-Down Spectroscopy Using Wavelength-Tunable Ultrashort Pulsed Light
- Development and Characterization of a New Compact Microwave Radical Beam Source
- Fabrication of Carbon Nanowalls Using Novel Plasma Processing
- Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH4 Plasma with Ar, N2, and H2 Dilution Gases
- Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique
- Plasma Induced Subsurface Reactions for Anisotropic Etching of Organic Low Dielectric Film Employing N2 and H2 Gas Chemistry
- Effects of Oxygen and Nitrogen Atoms on SiOCH Film Etching in Ultrahigh-Frequency Plasma
- Amorphous Silicon and Tungsten Etching Employing Environmentally Benign Plasma Process
- Low-$k$ SiOCH Film Etching Process and Its Diagnostics Employing Ar/C5F10O/N2 Plasma
- Wavelength Dependence of Photon-Induced Interface Defects in Hydrogenated Silicon Nitride/Si Structure during Plasma Etching Processes (Special Issue : Dry Process)
- A Novel Silicon-Dioxide Etching Process Employing Pulse-Modulated Electron-Beam-Excited Plasma
- Optical-Fiber-Type Broadband Cavity Ring-Down Spectroscopy Using Wavelength-Tunable Ultrashort Pulsed Light
- Supercritical Fluid Deposition of High-Density Nanoparticles of Photocatalytic TiO_2 on Carbon Nanowalls