Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma
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概要
- 論文の詳細を見る
A microwave excited non-equilibrium atmospheric pressure plasma source is developed and applied to chemical vapor deposition (CVD) of carbon nanotubes (CNTs). Multiwalled CNTs are successfully synthesized at a low temperature of 600°C by using mixtures of He/H2/CH4 and He/H2/CF4. From gas phase observations, high H2 dilution is found to be effective in the suppression of polymerization in the gas phase, thus contributing to CNTs growth on the catalyzed surface. This novel CVD system is has a great potential for the mass fabrication of CNTs.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-01-15
著者
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Hiramatsu Mineo
Nano Factory Department Of Electrical And Electronic Engineering Meijo University
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Zaima Shigeaki
Center For Cooperative Research In Advanced Science & Technology Nagoya University
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YAMAKAWA Koji
Department of Quantum Engineering, Nagoya University
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Nagai Mikio
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Matsushita Akio
Department Of Quantum Engineering Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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Nagai Mikio
Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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YAMAKAWA Koji
Department of Applied Materials Science, Osaka Prefecture University
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Hiramatsu Mineo
Nano Factory, Graduate School of Science and Technology, Meijo University, Tempaku-ku Nagoya 468-8502, Japan
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Zaima Shigeaki
Center of Cooperative Research in Advanced Science & Technology, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Matsushita Akio
Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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