Growth Processes and Electrical Characteristics of Silicon Nitride Films Formed on Si(100) by Radical Nitrogen

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-04-30

著者

• Yasuda Y

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Department Of Applied Physics Osaka City University

• SAKAI Akira

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• ZAIMA Shigeaki

  Center for Cooperative Research in Advanced Science and Technology, Nagoya University

• NAITO Shinya

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• IKEDA Hiroya

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• MATSUSHITA Daisuke

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• OHMORI Kenji

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• Naito Shinya

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Matsushita Daisuke

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Matsushita Daisuke

  Department Of Architecture And Architectural Engineering Graduate School Of Engineering Kyoto Univer

• Matsushita Daisuke

  Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation

• Ikeda Hiroya

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Shionogi Research Laboratories Shionogi & Co. Ltd.

• Ikeda H

  National Laboratory For High Energy Physics

• Zaima S

  Nagoya Univ. Nagoya Jpn

• Zaima Shigeaki

  Center For Cooperative Research In Advanced Science & Technology Nagoya University

• Ohmori Kenji

  Pharmaceutical Research Institute Kyowa Hakko Kogyo Co. Ltd.

• Ohmori Kenji

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Naito Susumu

  Research Laboratories Nippondenso Co. Ltd.:department Of Information Electronics Nagoya University

• Ohmori K

  Drug Development Research Laboratories Pharmaceutical Research Institute Kyowa Hakko Kogyo Co. Ltd

• Ohmori Koichi

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Naito S

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Department Of Applied Physics Faculty Of Engineering Nagoya University

• Sakai Akira

  Department Of Agricultural Chemistry The University Of Tokyo

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