Structural and Electrical Characteristics of HfO_2 Films Fabricated by Pulsed Laser Deposition

スポンサーリンク

概要

• 論文の詳細を見る
• 2001-09-25

著者

• Yasuda Y

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Department Of Applied Physics Osaka City University

• SAKAI Akira

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• SAKASHITA Mitsuo

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• ZAIMA Shigeaki

  Center for Cooperative Research in Advanced Science and Technology, Nagoya University

• HONDA Kazutaka

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• IKEDA Hiroya

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• GOTO Satoru

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• Sakashita Mitsuo

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Ikeda Hiroya

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Shionogi Research Laboratories Shionogi & Co. Ltd.

• Honda K

  Fujitsu Laboratories Ltd.

• Ikeda H

  National Laboratory For High Energy Physics

• Zaima S

  Nagoya Univ. Nagoya Jpn

• Zaima Shigeaki

  Center For Cooperative Research In Advanced Science & Technology Nagoya University

• Goto S

  Semiconductor Technology Laboratory Research & Development Group Oki Electric Industry Co. Ltd.

• Goto Satoru

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Yasuda Yukio

  Department Of Applied Physics Faculty Of Engineering Nagoya University

• Sakashita M

  Graduate School Of Engineering Nagoya University

• Sakai Akira

  Department Of Agricultural Chemistry The University Of Tokyo

関連論文

• Development of High-Angular-Resolution Microdiffraction System for Reciprocal Space Map Measurements
• Growth and Energy Bandgap Formation of Silicon Nitride Films in Radical Nitridation
• Invited Strain Engineering for SiGe Buffer Layers for High-Mobility Si Channels (先端デバイスの基礎と応用に関するアジアワークショップ(AWAD2005))
• Low-Temperature Formation of Epitaxial NiSi_2 Layers with Solid-Phase Reaction in Ni/Ti/Si(001) Systems
• Thermal Stability and Electrical Properties of (La_2O_3)_(Al_2O_3)_x Composite Films
• HfO_2 Film Formation Combined with Radical Nitridation and Its Electrical Characteristic
• Behavior of Local Current Leakage in Stressed Gate SiO_2 Films Analyzed by Conductive Atomic Force Microscopy
• Detection and Characterization of Stress-Induced Defects in Gate SiO_2 Films by Conductive Atomic Force Microscopy
• Growth of Silicon Nanocrystal Dots with High Number Density by Ultra-High-Vacuum Chemical Vapor Deposition
• Influence of Structural Variation of Ni Silicide Thin Films on Electrical Property for Contact Materials
• Conductive Atomic Force Microscopy Analysis for Local Electrical Characteristics in Stressed SiO_2 Gate Films
• Pulsed Laser Deposition and Analysis for Structural and Electrical Properties of HfO_2-TiO_2 Composite Films
• Microscopic Analysis of Stress-Induced Leakage Current in Stressed Gate SiO_2 Films Using Conductive Atomic Force Microscopy
• Reactive Deposition Epitaxy of CoSi_2 Films on Clean and Oxygen-Adsorbed Si(001) Surfaces
• Surface and Interface Smoothing of Epitaxial CoSi_2 Films by Solid-Phase Epitaxy Using Adsorbed Oxygen Layers and Two-Step Growth on Si(001) Surfaces
• Structural and Electrical Characteristics of HfO_2 Films Fabricated by Pulsed Laser Deposition
• Growth Processes and Electrical Characteristics of Silicon Nitride Films Formed on Si(100) by Radical Nitrogen
• Electrical Properties and Solid-Phase Reactions in Ni/Si(100) Contacts
• Population Difference and Pulse-Mode Optogalvanic Effect on Hel(2^3S-3^3P) 388.9-nm
• Author's Reply
• Erratum : Excitation Mechanism of the B^3_g-A^3Σ^+_u ir Laser Transition in N_2 Molecule
• A TE-N_2-Laser-Pumped Dye Laser of Littman Type
• New Far Infrared Laser Lines from Optically Pumped Methyl Alcohol and Their Assignments
• Excitation Process of the N_2 IR (B^3Π_g-A^3Σ^+_u) Laser Transition. II
• Excitation Process of the N_2 IR (B^3Π_g-A^3Σ^+_u) Laser Transition
• Excitation Mechanism of the B^3II_g-A^3Σ^+_u ir Laser Transition in N_2 Molecule
• Nitrogen-Laser-induced B^3Σu→X^3Σg Fluorescence of S_2 Molecules
• Time Relationship btween uv and ir Light Pulses in Nitrogen Laser
• Conductance Oscillations in Hopping Conduction Systems Fabricated by Focused Ion Beam Implantation ( Quantum Dot Structures)
• Surface Treatment of Ge(001) Surface by Radical Nitridation
• Conductance Oscillations in Low-Dimensional Ion Implanted Regions Annealed by Rapid Thermal Annealing
• Hydrogen Effects on Heteroepitaxial Growth of Ge Films on Si(111) Surfaces by Solid Phase Epitaxy
• Hydrogen Effects on Si_Ge_x/Si Heteroepitaxial Growth by Si_2H_6- and GeH_4-Source Molecular Beam Epitaxy
• Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma
• A Soft Acoustic Mode in the Ferroelastic Phase Transition of LaNbO_4
• Phase I/II study of tandem high-dose chemotherapy with autologous peripheral blood stem cell transplantation for advanced multiple myeloma
• Carrier Transport Properties of Conductive p-Si Wires by Focused Ion Beam Implantation
• RELATIONSHIP OF THE PHYSIOLOGICAL VARIABLES STUDIED BY IMPEDANCE CARDIOGRAPHY AND THEIR SIGNIFICANCES IN ESSENTIAL HYPERTENSION : Cardiac Surgery II, Hemodialysis, Hypertension II : IInd Auditorium : Proceedings of the 43rd Annual Meeting of the Japanese
• Myelodysplastic Syndrome Following Therapy for Brain Tumor
• Isolation and Characterization of Tn5-Induced Mutants of Pseudomonas paucimobilis UT26 Defective in γ-Hexachlorocyclohexane Dehydrochlorinase (LinA)
• Quantum Chemical Study of the Oxidation Sites in Hydrogen- and Water-Terminated Si Dimers : Attempt to Understand the Si-Si Back-Bond Oxidation on the Si Surface
• In-Situ Micro-Raman Scattering Investigation of LaNi_Co_Mn_Al_ Metal Hydride under Hydrogen Atmosphere
• VENTRICULAR SEPTAL DEFECT FOLLOWING ACUTE MYOCARDIAL INFARCTION : REPORT OF SIX CASES WITH SURGICAL TREATMENT
• Epitaxial Growth of (001)ZrN Thin Films on (001)Si by Low Temperature Process
• Growth of High-Quality Carbon Nanotubes by Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition for Field Emitters
• DETECTION OF RIGHT VENTRICULAR INFARCTION BY RADIONUCLIDE ANGIOCARDIOGRAPHY USING RIGHT VENTRICULAR REGIONAL EJECTION FRACTION IMAGE : Radio isotope : FREE COMMUNICATIONS (Abstract) : 45 Annual Scientific Meeting, Japanese Circulation Society
• CIRCULATORY EFFECT OF OP-1206, AN ORAL PROSTAGLANDIN E_1 DERIVATIVE : Cardiovascular drugs (II) : FREE COMMUNICATIONS (Abstract) : 45 Annual Scientific Meeting, Japanese Circulation Society
• HEMODYNAMIC RESPONSES TO VOLUME EXPANSION AND NITROGLYCERIN APPLICATION IN ISCHEMIC HEART DISEASE : Ventricular Function in Ischemic Heart Disease I : PROCEEDINGS OF THE 44th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
• RI-ANGIOGRAPHIC ANALYSIS OF LEFT VENTRICULAR WALL MOTION IN ISCHEMIC HEART DISEASE : Computer Tomography, Radio-isotope : IVth Auditorium : Proceedings of the 43rd Annual Meeting of the Japanese Circulation Society, Tokyo, 1979
• Invited Strain Engineering for SiGe Buffer Layers for High-Mobility Si Channels (先端デバイスの基礎と応用に関するアジアワークショップ(AWAD2005))
• Thermal Stability and Electrical Properties of (La_2O_3)_(Al_2O_3)_x Composite Films
• Elastic Anomaly of the Ferroelectric Phase Transition of Li_2Ge_7O_ Studied by the Brillouin Scattering
• Plasma Carnitine Concentrations in Patients Undergoing Open Heart Surgery
• Local Leakage Current of HfO_2 Thin Films Characterized by Conducting Atomic Force Microscopy
• Brillouin Scattering Study of Deuterated Dicalcium Strontium Propionate,Ca_2Sr (C_2D_5CO_2)_6
• Spontaneous Polarization of Deuterated Dicalcium Strontium Propionate,Ca_2Sr (C_2D_5CO_2)_6
• On the ω-q Relation of the Soft Mode of KDP Studied by Light Scattering under a High Pressure
• Elastic Instability in the Ferroelastic Phase Transition of TlH_2PO_4 Studied by Brillouin Scattering
• Dielectric Anomaly at the Phase Transition of RbD_3(SeO_3)_2
• Incommensurate Phase in γ-Irradiated RbH_3(SeO_3)_2 and RbD_3(SeO_3)_2
• Initial Oxidation Processes of H-Terminated Si(100) Surfaces Analyzed using a Random Sequential Adsorption Model
• Influences of Impurities on Oxidation Processes of Si(100) Substrates
• Influences of Impurities on Oxidation Processes of Si(100) Substrates
• Growth Processes and Electrical Characteristics of Silicon Nitride Films Formed on Si(100) by Radical Nitrogen
• Microscopic Observation of X-Ray Irradiation Damage in Ultra-Thin SiO_2 Films
• Microscopic Observation of X-Ray Irradiation Damages in Ultra-Thin SiO_2 Films
• Oxide Formation on Si(100)-2×1 Surfaces Studied by Scanning Tunneling Microscopy/Scanning Tunneling Spectroscopy
• Study on Oxidation of Si(100)-2x1 Surfaces by Scanning Tunneling Microscopy/Scanning Tunneling Spectroscopy
• Optical Phonons in Ferroelectric-Semiconductor Zn_Li_O Single Crystal Studied by Micro-Raman Scattering : Condensed Matter: Electronic Properties, etc.
• Micro-Raman Scattering Study of the Ferroelectric Phase Transition in Tb_2(MoO_4)_3 in the Frequency Region of MoO_4 Internal Modes
• Electrical Properties and Solid-Phase Reactions in Ni/Si(100) Contacts
• Structural and Electrical Characteristics of HfO_2 Films Fabricated by Pulsed Laser Deposition
• The Maturation of Myeloma Cells Correlates with Sensitivity to Chemotherapeutic Agents
• Temperature Dependence of Desorption in Highly Photo-Excited CdS
• Dislocation propagation in GaN films formed by epitaxial lateral overgrowth
• A Central Peak in the Order-Disorder Phase Transition of Sodium Nitrate
• Characterization of SOS Films Grown with Amorphous Si Buffer Layers by MOS FET's
• Rayleigh and Brillouin Scattering in RbH_3(SeO_3)_2 near the Phase Transition Temperature
• Infrared Enhancement in Nitrogen Laser operating near Threshold by addition of He
• Coulomb Blockade Phenomena in Si Metal-Oxide-Semiconductor Field-Effect Transistors with Nano-Scale Channels Fabricated Using Focused-Ion Beam Implantation
• Novel Nonvolatile Random-Access Memory with Si Nanocrystals for Ultralow-Power Scheme
• Clinical significance of co-expression of CD21 and LFA-1 in B-cell lymphoma
• Control of Crystal Structure and Ferroelectric Properties of Pb(Zr_xTi_)O_3 Films Formed by Pulsed Laser Deposition
• Pulsed-Laser Induced Desorption in GaAs :A Dynamic Pulse Mass Counting Study
• Temperature Dependence of Raman Scattering Spectra in Lead Nitrate Crystal
• Sex Determination of Bovine Embryos by the Polymerase Chain Reaction Using Y-Specific Primers
• Progressive Myeloma after Thalidomide Therapy in a Patient with Immature Phenotype of Myeloma (Plasma) Cells
• Brillouin Scattering Study of Elastic Anisotropy in an Injection Molded Polycarbonate Solid
• Thromboembolism Originated from the Pulmonary Artery Stump after Fontan Operation
• A Diffusive Mode in KH_2PO_4 Studied with a Tandem System Using a Fabry-Perot Interferometer and a Double-Grating Monochromator
• Atomic-Scale Characterization of Nitridation Processes on Si(100)-$2\times 1$ Surfaces by Radical Nitrogen
• Application of a Two-Step Growth to the Formation of Epitaxial CoSi2 Films on Si(001) Surfaces: Comparative Study using Reactive Deposition Epitaxy
• Atomic Scale Characterization of Nitridation Process on Si(100)-2x1 Surfaces by Radical Nitrogen
• Establishment of an HS23 stromal cell-dependent myeloma cell line : fibronectin and IL-6 are critical
• Clinical Significance of Serum S-100β Protein Level After Pediatric Cardiac Surgery
• Giant granulocytic sarcoma of the vagina concurrent with acute myeloid leukemia with t(8;21)(q22;q22) translocation
• PREDICTION OF UNDISTURBED SILTY-CLAY BEHAVIOUR IN A MULTI-CONTROLLED CYCLIC TRIAXIAL TEST
• Studies on Reaction Processes of Hydrogen and Oxygen Atoms with H_2O-Adsorbed Si(100) Surfaces by High-Resolution Electron Energy Loss Spectroscopy
• Improvements of Electrical Characteristics of Hf/p-Si(100) Interfaces by H-Termination
• Oxidation Processes on H-Terminated Si(100) Surfaces Studied by High-Resolution Electron Energy Loss Spectroscopy

もっと見る 閉じる

スポンサーリンク