Carrier Transport Properties of Conductive p-Si Wires by Focused Ion Beam Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-30
著者
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Yasuda Y
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Yasuda Yukio
Department Of Applied Physics Osaka City University
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ZAIMA Shigeaki
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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IWANO Hirotaka
Department of Crystalline Materials Science, School of Engineering, Nagoya University
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Kimura Tomonori
Department of Applied Biological Science, Faculty of Science and Technology, Tokyo University of Sci
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Kimura Tomonori
Department Of Crystalline Materials Science School Of Engineering Nagoya University
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MATSUO Kohji
Department of Crystalline Materials Science, School of Engineering, Nagoya University
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Matsuo Kohji
Department Of Crystalline Materials Science School Of Engineering Nagoya University
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Yasuda Yukio
Department Of Applied Physics Faculty Of Engineering Nagoya University
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IWANO Hirotaka
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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