Characterization of Local Current Leakage in La2O3–Al2O3 Composite Films by Conductive Atomic Force Microscopy
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概要
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We have observed local current leakage in La2O3–Al2O3 composite films using conductive atomic force microscopy (C-AFM). The La2O3–Al2O3 composite films were synthesized by pulsed laser deposition and post deposition annealing. Current–voltage characteristics obtained from the average current detection from C-AFM current images agreed well with these from MOS capacitors made from the film, and the effect of the local current leakage sites on general current leakage properties of the capacitor was demonstrated. Appearance of current leakage spots is clearly dependent on the voltage measured during C-AFM observations. We confirmed that there are at least three types of leakage spots which have different voltage dependence and discussed the origin of these leakage spots. Breakdown and degradation in this film were also demonstrated.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-04-30
著者
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SEKO Akiyoshi
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University
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Sakashita Mitsuo
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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OGAWA Masaki
Center for Cooperative Research in Advanced Science & Technology, Nagoya University
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Zaima Shigeaki
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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Sago Toshifumi
Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Ogawa Masaki
Center for Cooperative Research in Advanced Science and Technology, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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