Formation of Au and AuSi_x-Pyramids in Separation by Implanted Oxygen Wafers with Si Pillars in SiO_2 Layer

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-11-01

著者

• ZAIMA Shigeaki

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• SAKASHITA Mitsuo

  Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University

• Sakashita Mitsuo

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Sakashita Mitsuo

  Department Of Crystalline Materials Science School Of Engineering Nagoya University

• Sakashita Mitsuo

  Japan Fine Ceramics Center

• Sakashita M

  Nagoya Univ. Nagoya Jpn

• Shibata N

  Japan Fine Ceramics Center Nagoya Jpn

• Zaima Shigeaki

  Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University

• Ishikawa Y

  Research Center For Interface Quantum Electronics And Graduate School Of Electronics And Information

• Ishikawa Y

  Dowa Mining Co. Ltd. Tokyo

• ISHIKAWA Yukari

  Japan Fine Ceramics Center

• SAITO Tomohiro

  Japan Fine Ceramics Center

• SHIBATA Noriyoshi

  Japan Fine Ceramics Center

• Shibata N

  Ntt Optoelectronics Laboratories Nippon Telegraph And Telephone Corporation

• Ishikawa Y

  Hokkaido Univ. Sapporo Jpn

• Shibata N

  Japan Fine Ceramics Center Nggoya Jpn

• Saito T

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.

• Saito T

  School Of Engineering Nagoya University

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