In Situ Transmission Electron Microscopy Observation of Au-Si Interface Reaction
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-06-15
著者
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Shibata N
Japan Fine Ceramics Center Nagoya Jpn
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Ishikawa Y
Research Center For Interface Quantum Electronics And Graduate School Of Electronics And Information
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Ishikawa Y
Dowa Mining Co. Ltd. Tokyo
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ISHIKAWA Yukari
Japan Fine Ceramics Center
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SAITO Tomohiro
Japan Fine Ceramics Center
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SHIBATA Noriyoshi
Japan Fine Ceramics Center
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Shibata N
Ntt Optoelectronics Laboratories Nippon Telegraph And Telephone Corporation
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Ishikawa Y
Hokkaido Univ. Sapporo Jpn
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Shibata N
Japan Fine Ceramics Center Nggoya Jpn
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Saito T
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.
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Saito T
School Of Engineering Nagoya University
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