Microscopic Structure of Stepwise Threading Dislocation in 4H-SiC Substrate
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概要
- 論文の詳細を見る
The dislocation structure that forms the caterpillar-shaped etch pit upon molten KOH etching is investigated by transmission electron microscopy employing a weak-beam dark-field method. The observed dislocation has the Burgers vector 1/3[\bar{1}2\bar{1}0], and its structure was transformed from a basal plane dislocation to a threading edge dislocation. In the basal plane dislocation region, it propagated parallel to the [10\bar{1}0] direction. On the basis of the measured dislocation structure, the caterpillar pit formation is explained. The process of dislocation formation is discussed by analyzing the relationship between sample types and the detection of the caterpillar pits.
- 2012-04-25
著者
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ISHIKAWA Yukari
Japan Fine Ceramics Center
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SHIBATA Noriyoshi
Japan Fine Ceramics Center
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Bessho Takeshi
Higashifuji Technical Center Toyota Motor Corporation
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SUZUKI Hiroshi
Higashifuji Technical Center, Toyota Motor Corporation
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Saitoh Hiroaki
Higashifuji Technical Center Toyota Motor Corporation
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Kawai Yoichiro
Higashifuji Technical Center Toyota Motor Corporation
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Danno Katsunori
Higashifuji Technical Center Toyota Motor Corporation
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SUGAWARA Yoshihiro
Japan Fine Ceramics Center (JFCC)
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Ishikawa Yukari
Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Sugawara Yoshihiro
Japan Fine Ceramics Center, Nagoya 456-8587, Japan
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Kawai Yoichiro
Higashifuji Technical Center, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Bessho Takeshi
Higashifuji Technical Center, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Danno Katsunori
Higashifuji Technical Center, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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Saitoh Hiroaki
Higashifuji Technical Center, Toyota Motor Corporation, Susono, Shizuoka 410-1193, Japan
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