12-O-08 Oxidation Behavior of Aluminum Nitride Thin Films on Si and Superalloy Substrates
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Sasaki Yasuhiro
Display Device Development Division Nec Corporation
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Ito Hiroki
Japan Fine Ceramics Center
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SHIBATA Noriyoshi
Japan Fine Ceramics Center
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Sasaki Yasuhiro
Functional Devices And Material Laboratories Nec Corporation
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YAMASHITA Masashi
Japan Fine Ceramics Center (JFCC)
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SASAKI Yukichi
Japan Fine Ceramics Center (JFCC)
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MATSUNAGA Yasuo
Japan Fine Ceramics Center (JFCC)
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MATSUBARA Hideaki
Japan Fine Ceramics Center (JFCC)
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