Etching of Nondiamond Carbon in Diamond Thin Films Synthesized by Hot-Filament Chemical Vapor Deposition with Ultraviolet Irradiation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-03-15

著者

• Hirose Yoichi

  Department Of Electronics School Of Engineering Tokai University

• Ishikawa Y

  Research Center For Interface Quantum Electronics And Graduate School Of Electronics And Information

• Ishikawa Y

  Dowa Mining Co. Ltd. Tokyo

• Hirose Yuji

  Faculty Of Engineering Yamanashi University

• Hirose Yukio

  Department Of Materials Science And Engineering Kanazawa University

• Ishikawa Y

  Hokkaido Univ. Sapporo Jpn

• ISHIKAWA Yutaka

  Department of Electro and Electronics Engineering, Nippon Institute of Technology

• Ishikawa Yutaka

  Department Of Electrical And Electronics Engineering Nippon Institute Of Technology

• Hirose Y

  Department Of Materials Science And Engineering Kanazawa University

• YOSHIMI Hideto

  Department of Electrical and Electronics Engineering, Nippon Institute of Technology

• Hirose Yoichi

  Department Of Electrical Engineering And Electronics Nippon Institute Of Technology

• Yoshimi H

  Nitto Denko Corp. Toyohashi Jpn

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