Characteristics of 1MHz Discharge in SF_6/O_2 Mixture in a Parallel-Plate System

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-08-15

著者

• 佐々木 聡

  東京工業大学 応用セラミックス研究所

• Hirose Yoichi

  Department Of Electronics School Of Engineering Tokai University

• ISHIKAWA Itsuo

  Faculty of Engineering, Yamanashi University

• SUGANOMATA Shinji

  Faculty of Engineering, Yamanashi University

• SAITO Yukinori

  Faculty of Engineering Yamanashi University

• Ishikawa I

  Faculty Of Engineering Yamanashi University

• Ishikawa Itsuo

  Faculty Engineering Yamanashi University

• Saito Y

  Faculty Of Engineering Yamanashi University

• Sasaki Shinya

  Faculty Of Engineering Yamanashi University

• AOYAGI Kenji

  Faculty of Engineering, Yamanashi University

• HIROSE Yuuji

  Faculty of Engineering, Yamanashi University

• Hirose Yuji

  Faculty Of Engineering Yamanashi University

• Suganomata Shinji

  Electrical Engineering Yananashi University

• Suganomata Shinji

  Faculty Engineering Yamanashi University

• Hirose Yukio

  Department Of Materials Science And Engineering Kanazawa University

• Hirose Y

  Department Of Materials Science And Engineering Kanazawa University

• Aoyagi Kenji

  Faculty Of Engineering Yamanashi University

• Suganomata S

  Faculty Of Engineering Yamanashi University

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