Ionic Species in 13.56 MHz Discharges in CF 4 Gas and Mixtures of It with Ar and O 2
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概要
- 論文の詳細を見る
Signal intensities of positive ions were measured in situ by direct sampling from parallel-plate discharges in CF4/Ar and CF4/O2 mixtures using a quadrupole mass spectrometer. Major positive ions in CF4/Ar discharge are CFx+ (x=3, 2, 1) and Ar+. Some of the production of CF2+ and CF+ is considered to be due to the contribution of Ar+. Major positive ions in CF4/O2 discharge are CF3+, Oy+ and Fy+ (y=2, 1). The signal intensity of CO2+ is of the same order as that of Fy+. The signal intensities of Fy+ and O+ in CF4/O2 discharge are higher than those in pure CF4 and O2 discharges, respectively. Intensity ratios of the ions vary with the gas mixing ratios.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
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SAITO Yukinori
Faculty of Engineering Yamanashi University
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Ishikawa Itsuo
Faculty Engineering Yamanashi University
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Sasaki Shinya
Faculty Of Engineering Yamanashi University
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Nagaseki Kazuya
Tokyo Electron Yamanashi Ltd.
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Suganomata Shinji
Faculty Engineering Yamanashi University
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Ishikawa Itsuo
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Nagaseki Kazuya
Tokyo Electron Ltd., Nirasaki 407-01, Japan
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Nagaseki Kazuya
Tokyo Electron Yamanashi Ltd., Kitashimojo 2381-1, Fujii-machi, Nirasaki 407, Japan
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Suganomata Shinji
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Sasaki Shinya
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Saito Yukinori
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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