Electron Temperature in RF Discharge Plasma of CF_4/N_2 Mixture
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-10-15
著者
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Kobayashi Hidehiko
Faculty Of Engineering Yamanashi University
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ISHIKAWA Itsuo
Faculty of Engineering, Yamanashi University
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SUGANOMATA Shinji
Faculty of Engineering, Yamanashi University
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Ishikawa I
Faculty Of Engineering Yamanashi University
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Ishikawa Itsuo
Faculty Engineering Yamanashi University
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Sasaki Shinya
Faculty Of Engineering Yamanashi University
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Suganomata S
Yamanashi Univ. Kofu Jpn
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Suganomata Shinji
Electrical Engineering Yananashi University
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Suganomata Shinji
Faculty Engineering Yamanashi University
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Kobayashi H
Nagaoka Univ. Technol. Niigata Jpn
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Suganomata S
Faculty Of Engineering Yamanashi University
関連論文
- Electron Temperature in RF Discharge Plasma of CF_4/N_2 Mixture
- Mass Spectrometry of Discharge Products at 13.56 MHz in SF_6 Gas ( Plasma Processing)
- Spatiotemporal Profiles of Optical Emission Spectra in CF_4 Discharges at 1 MHz ( Plasma Processing)
- Low-Frequency Waves in SF_6 Positive Columns Diluted with N_2 Gas
- Attachment-Enhanced Instability in CF_4 Positive Columns
- Forward Waves Excited by Pulsed Electron Beam Injection into Low-Pressure N_2 Gas
- Discharge and Oscillation due to Axial Injection of an Impulsive Electron Beam into SF_6 Gas
- Positive Ions in RF Discharge Plasmas of C_4F_8/Ar and C_4F_8/O_2 Mixtures
- Positive Ions in C_4F_8 RF Discharge in a Planar Diode
- Characteristics of Parallel-Plate RF Discharges in C_4F_8 Gas and C_4F_8/O_2 Mixtures
- Ionic Species in 13.56 MHz Discharges in CF_4 Gas and Mixtures of It with Ar and O_2
- Positive and Negative Ions in RF Plasmas of SF_6/N_2 and SF_6/Ar Mixtures in a Planar Diode
- Positive Ions in RF Discharge Plasma of CF_4 Gas in a Planar Diode
- Negative Ions in 13.56 MHz Discharge of SF_6 Gas in a Planar Diode
- Mass Spectrometrie Observation of Decomposition Products SF_x (x=1,2) in SF_6 Discharge at 13.56 MHz
- Characteristics of 1MHz Discharge in SF_6/O_2 Mixture in a Parallel-Plate System
- Characteristics of 1-MHz Discharges in SF_6/Ar and CF_4/Ar Mixtures in a Parallel-Plate System
- Mode Change of 1 MHz Discharge in O_2 Gas at Low Pressure
- Detection Technique of Negative Ions by Photodetachment in SF_6 Low-Frequency Discharge
- Spatiotemporal Variation of Light Emission from SF_6 Parallel-Plate Discharge at Frequencies of 100 and 500 kHz
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- Ionic Species in 13.56 MHz Discharges in CF 4 Gas and Mixtures of It with Ar and O 2
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