Growth of Native Oxide and Accumulation of Organic Matter on Bare Si Wafer in Air

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-08-01

著者

• SHINGYOUJI Takayuki

  Central Research Institute, Mitsubishi Materials Corporation

• Shingyouji Takayuki

  Central Research Inst. Mitsubishi Materials Corporation

• RYUTA Jiro

  Central Research Institute, Mitsubishi Materials Corporation

• Kobayashi H

  Nagaoka Univ. Technol. Niigata Jpn

• Ryuta J

  Mitsubishi Materials Corp. Saitama Jpn

• Ryuta Jiro

  Central Research Institute Mitsubishi Materials Corporation

• TAKAHASHI Isao

  Central Research Institute, Mitsubishi Materials Corporation

• OKADA Chizuko

  Central Research Institute, Mitsubishi Materials Corporation

• KOBAYASHI Hiroyuki

  Central Research Institute, Mitsubishi Materials Corporation

• Okada Chizuko

  Central Research Institute Mitsubishi Materials Corporation

• Kobayashi H

  Department Of Earth & Spece Science Graduate School Of Science Osaka University

• Takahashi Isao

  Central Research Institute Mitsubishi Materials Corporation

関連論文

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• Spatiotemporal Profiles of Optical Emission Spectra in CF_4 Discharges at 1 MHz ( Plasma Processing)
• Light Scattering by Submicron Particles on Film-Coated Wafers
• Adsorption and Desorption of Metallic Impurities on Si Wafer Surface in SC1 Solution
• Radial Distribution of Oxygen Precipitates in Czochralski Silicon Single Crystals
• Possible Involvement of 5-HT_4 Receptors, in Addition to 5-HT_3 Receptors, in the Emesis Induced by High-Dose Cisplatin in Suncus murinus
• Comparison of the Antidiarrheal Effects of Zaldaride Maleate and Its Optical Isomers in Rats
• Gender Differences in the Antidiarrheal Effect of Zaldaride Maleate in Rats
• Antidiarrheal Effects of Zaldaride Maleate After Oral, Intravenous and Subcutaneous Administration to Rats
• Effect of Crystal Pulling Rate on Formation of Crystal-Originated "Particles" on Si Wafers
• Crystal-Originated Singularities on Si Wafer Surface after SCl Cleaning
• X-Ray Photoelectron Spectroscopy of Si-As-Te Chalcogenide Glasses Prepared in the Earth's Gravity and in Microgravity
• Valence Band Structure of Si-As-Te Chalcogenide Glasses Prepared in the Gravity Environment of the Earth and in a Microgravity Environment in Space
• Effect of Native Oxide upon Formation of Amorphous SiO_x Layer at the Interface of Directly Bonded Silicon Wafers
• Upper Limits of Electron Beam Currents Focusable with High-T_c Bulk Superconductor Lenses (Supertrons)
• Effect of Interstitial Oxygen on Formation of Amorphous SiO_x Layer in Directly Bonded Czoehralski Silicon Wafers
• Surface Preparation, Growth, and Interface Control of Ultrathin Gate Oxides
• Spectroscopic and Theoretical Studies of Interface States at Ultrathin Oxide/Si Interfaces
• Interface States at Ultrathin Chemical Oxide/Silicon Interfaces Obtained from Measurements of XPS Spectra under Biases
• Interface States for Si-Based MOS Devices with an Ultrathin Oxide Layer : X-Ray Photoelectron Spectroscopic Measurements under Biases
• A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
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• Confirmation of the Distribution of Measured Values from an Ultrasound Fetal Heart Rate Monitor
• Estimation of Measurement Characteristics of Ultrasound Fetal Heart Rate Monitor
• Time-Dependent Variation of Composition of SC1 Solution
• Quantitative Analysis of Surface Contaminations on Si Wafers by Total Reflection X-Ray Fluorescence
• New Method for Observation of Interface States in the Semiconductor Band-Gap : XPS Measurements under Biases(Interfaces by various techniques)
• Direct Spectroscopic Evidence of Bias-Induced Shifts of Semiconductor Band Edges for Metal-Insulator-Semiconductor Diodes
• Experimental Corroboration for a Ferrite-Core Model of High-T_c Bulk Superconductor Lenses (Supertrons)
• Optical Properties of an InGaAlAs/InP Type-II Superlattice
• Type I/Type II Transition in InGaAlAs/InP Multiple Quantum Well Structures Grown by Gas Source Molecular Beam Epitaxy
• Measurement of Organic Matter on Si Wafer by Thermal Desorption Spectroscopy
• Growth of Native Oxide and Accumulation of Organic Matter on Bare Si Wafer in Air
• Electroabsorption in an AlInAs/InP Type II Superlattice
• Study of Si Etch Rate in Various Composition of SC1 Solution
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• Effect of Measurement Error of Cardiotocograph to Spectral Analysis : Medical Ultrasonics
• Effects of Olopatadine Hydrochloride on the Increase of Histamine and Peptide-Leukotrienes Concentrations in Nasal Lavage Fluid Following the Antigen-Antibody Reaction in Actively Sensitized Guinea Pigs
• Detection of Bulk Microdefects underneath the Surface of Si Wafer Using Infrared Light Scattering Tomography
• Oscillator-Amplifier System in N_2 Laser Using the Pressure-Dependent Formative Time-Lag of Discharge
• Calculation of Diffusion Component of Leakage Currentin pn Junctions Formed in Various Types of Silicon Wafers (Intrinsic Gettering, Epitaxial, Silicon on Insulator)
• Identification of Human P450 Isoforms Involved in the Metabolism of the Antiallergic Drug, Oxatomide, and Its Inhibitory Effect on Enzyme Activity (Miscellaneous)
• Identification of Human P450 Isoforms Involved in the Metabolism of the Antiallergic Drug, Oxatomide, and Its Kinetic Parameters and Inhibition Constants(Miscellaneous)
• Decrease in Ozone Density of Atmospheric Surface-Discharge Plasma Source
• Behavior of Dust Particles in Plasma Etching Apparatus

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