Crystal-Originated Singularities on Si Wafer Surface after SCl Cleaning
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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RYUTA Jiro
Central Research Institute, Mitsubishi Materials Corporation
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Tanaka T
Mitsubishi Materials Silicon Corporation
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MORITA Etsuro
Central Research Institute, Mitsubishi Materials Corporation
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TANAKA Toshiro
Japan Silicon Co., Lid.
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SHIMANUKI Yasushi
Central Research Institute, Mitsubishi Metal Corporation
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Morita Etsuro
Central Research Institute Mitsubishi Materials Corporation
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Ryuta J
Mitsubishi Materials Corp. Saitama Jpn
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Ryuta Jiro
Central Research Institute Mitsubishi Materials Corporation
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Morita E
Mitsubishi Materials Silicon Co. Ltd.
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Tanaka Toshiro
Japan Silicon Co. Lid.
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Shimanuki Y
Mitsubishi Materials Silicon Corp. Chiba Jpn
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Shimanuki Yasushi
Central Research Institute Mitsubishi Metal Corporation
関連論文
- Adsorption and Desorption of Metallic Impurities on Si Wafer Surface in SC1 Solution
- Soft X-Ray Microscope with Zone Plates at UVSOR I : Performance
- Observation of Wet Biological Specimen by Soft X-Ray Microscope with Zone Plates at UVSOR
- Effect of Crystal Pulling Rate on Formation of Crystal-Originated "Particles" on Si Wafers
- Crystal-Originated Singularities on Si Wafer Surface after SCl Cleaning
- Effect of Native Oxide upon Formation of Amorphous SiO_x Layer at the Interface of Directly Bonded Silicon Wafers
- Field Ion-Scanning Tunneling Microscope Equipped with Molecular Beam Epitaxy and Its Application to Study Semiconductor Surface Structure
- Time-Dependent Variation of Composition of SC1 Solution
- Quantitative Analysis of Surface Contaminations on Si Wafers by Total Reflection X-Ray Fluorescence
- Measurement of Organic Matter on Si Wafer by Thermal Desorption Spectroscopy
- Growth of Native Oxide and Accumulation of Organic Matter on Bare Si Wafer in Air
- Study of Si Etch Rate in Various Composition of SC1 Solution
- Annealing Behavior of Light Scattering Tomography Defect in the Denuded Zone of Si Wafers
- Effects of Thermal History on Microdefect Formation in Czochralski Silicon Crystals