Light Scattering by Submicron Particles on Film-Coated Wafers

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-05-15

著者

• Kametani Hitoshi

  General Research Laboratory Mitubishi Electric Corporation

• IWASAKI Hiroshi

  The Institute of Scient4fic and Industrial Research, Osaka University

• YOSHINOBU Tatsuo

  The Institute of Scientific and Industrial Research, Osaka University

• Kondo H

  The Institute Of Scientific And Industrial Research Osaka University

• Yoshinobu T

  Osaka Univ. Osaka Jpn

• Yoshinobu Tatsuo

  The Institute Of Scientific And Industrial Research Osaka University

• Yoshinobu Tatsuo

  Department Of Electrical Engineering Kyoto University:(present Address) The Institute Of Scientific

• KONDO Hideyuki

  The Institute of Scientific and Industrial Research, Osaka University

• SHINGYOUJI Takayuki

  Mitsubishi Materials Silicon Corporation

• YANAGI Shigenari

  Central Research Institute, Mitsubishi Materials Corporation

• TAKAISHI Kazushige

  Central Research Institute, Mitsubishi Materials Corporation

• SHINGYOUJI Takayuki

  Central Research Institute, Mitsubishi Materials Corporation

• Shingyouji T

  Mitsubishi Materials Corp. Saitama Jpn

• Shingyouji Takayuki

  Central Research Inst. Mitsubishi Materials Corporation

• Kondo Hideyuki

  The Institute Of Scientific And Industrial Research Osaka University

• Kondo Hideyuki

  Central Research Institute Mitsubishi Materials Corporation

• Kondo H

  Nikon Corp.

• Yanagi Shigenari

  Central Research Institute Mitsubishi Materials Corporation

• Takaishi Kazushige

  Central Research Institute Mitsubishi Materials Corporation

関連論文

• Interface Morphology of Thermal-Oxide/Si(001) Studied by Scanning Tunneling Microscopy
• Quantum Yield of Electron-Beam Induced Decomposition of SiO_2 Overlay on Si in Nanolithography Using Scanning Tunneling Microscope : Surfaces, Interfaces, and Films
• Electron Tunneling through SiO_2/Si Structures in Scanning Tunneling Microscopy : Surfaces, Interfaces, and Films
• Nanopit Formation and Manipulation of Steps on Si(001)at High Temperatures with a Scanning Tunneling Microscope
• Current-Induced Step Bunching on Vicinal Si(111)Studied by Light Scattering
• Controllable Nanopit Formation on Si(001) with a Scanning Tunneling Microscope
• Experimental Measurement of the Intensity Profiles of a Low-energy Electron Beam Extracted from a Scanning Tunneling Microscope Tip by Field Emission
• Defect Production in Phosphorus Ion-Implanted SiO_2(43 nm)/Si Studied by a Variable-Energy Positron Beam
• Characterization of Separation-by-Implanted-Oxygen Wafers with Monoenergetic Positron Beams
• Application of Chemical Imaging Sensor to Electro Generated pH Distribution
• Visualization of pH Change of E. coli with a Novel pH Imaging Microscope
• Observation of Microorganisms Colonies Using a Scanning-Laser-Beam pH-Sensing Microscope
• Improvememt of Spatial Resolution of a Laser-Scanning pH-Imaging Sensor
• Anisotropic Waves Propagating on Two-Dimensional Arrays of Belousov-Zhabotinsky Oscillators
• Simulation of Light Scattering by a Particle on a Film-Coated Substrate Using Coupled-Dipole Method
• Light Scattering by Submicron Particles on Film-Coated Wafers
• Redox Potential Imaging Sensor
• Cracking of Saturated Hydrocarbon Gas Molecular Beam for Carbonization of Si(001) Surface
• Undoped Silicon Layers Grown by Gas Source Molecular Beam Epitaxy Using Si_2H_6
• Interface Modification by Hydrocarbon Gas Molecular Beams in Heteroepitaxy of SiC on Si
• Enhanced Nano-Oxidation on a SCi-Treated Si Surface Using Atomic Force Microscopy
• Nanotribology of Clean and Oxide-Covered Silicon Surfaces Using Atomic Force Microscopy
• Fabrication of Nanopit Arrays on Si (111)
• Scanning Tunneling Microscopy Study of the Misfit Layer Compounds (LaSe)_xNbSe_2 and (PbSe)_xNbSe_2
• Scaling Analysis of SiO_2/Si Interface Roughness by Atomic Force Microscopy
• Mesoscopic Roughness Characterization of Grown Surfaces by Atomic Force Microscopy
• Scanning Tunneling Microscope (STM)-Excited Molecular Fluorescence from Porphyrin Thin Films
• Low Energy Electron Stimulated Etching of Thin Si-Oxide Layer in Nanometer Scale Using Scanning Tunneling Microscope
• Low Energy Electron Stimulated Etching of Thin Si Oxide Layer Using STM : Nano-fabrication with A Localized Low-energy e-Beam
• Scanning Tunneling Microscopy Study of Faceting on Vicinal Si(113)
• STM Nano-Lithography with SiO_2 Mask
• Low Energy Electron Beam Stimulated Surface Reaction: Selective Etching of SiO_2/Si Using Scanning Tunneling Microscope
• Fluctuations of a Single Step and surface Height on Vicinal Surfaces
• Adsorption and Desorption of Metallic Impurities on Si Wafer Surface in SC1 Solution
• Radial Distribution of Oxygen Precipitates in Czochralski Silicon Single Crystals
• Application of the pH-Imaging Sensor to Determining the Diffusion Coefficients of Ions in Electrolytic Solutions
• Nanoscale Patterning of Au Films on Si Surfaces by Atomic Force Microscopy
• Defects Introduced by MeV-Energy Ion Implantation into Si Probed by a Monoenergetic Positron Beam
• Solution of the Knapsack Problem by Deoxyribonucleic Acid Computing
• Effects of the Fermi Level on Defects in Be^+-Implanted GaAs Studied by a Monoenergetic Positron Beam
• Effect of Interstitial Oxygen on Formation of Amorphous SiO_x Layer in Directly Bonded Czoehralski Silicon Wafers
• XPS Study of Gd-Co and Gd-Fe Amorphous Films
• A Consideration of the Chemical Shift in ESCA Spectra from Oxide/Semiconductor Interface
• Effects of Water Vapor and Oxygen Excitation on Oxidation of GaAs, GaP and InSb Surfaces Studied by X-Ray Photoemission Spectroscopy
• Determination of Depth Profiles by Angular Dependent X-Ray Photoelectron Spectra
• An XPS Analysis of Thermally Grown Oxide Film on GaP
• X-Ray Photoemission Study of the Interaction of Oxygen and Air with Cleaved GaAs (110) Surfaces
• Diffuse Scattering in the High-Temperature(1×1)State of Si(111)
• Surface Plasmon Dispersions of Ag Adsorbed Si(111) Surfaces Studied by Angle-Resolved Electron Energy Loss Spectroscopy
• Inelastic Low Energy Electron Diffraction Measurements of Hydrogen Adsorbed Si (001) Surfaces: 2×1:H and 1×1: :2H
• Dispersion of Surface-Plasmon at Clean Si(001)-2×1 Surface
• A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
• Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure
• Stress-Enhanced Diffusion of Boron at the Interface of a Directly Bonded Silicon Wafer
• Direct Observation of Deoxyribonucleic Acid Anchored between an Aluminum Electrode and an Atomic Force Microscope Cantilever
• Atomic Force Microscopy Observation of Deoxyribonucleic Acid Stretched and Anchored onto Aluminum Electrodes
• Topography Dependence of Tunneling-Induced Fluorescence from Porphyrin Film
• Time-Dependent Variation of Composition of SC1 Solution
• Study of Transmittance of Polymers and Influence of Photoacid Generator on Resist Transmittance at Extreme Ultraviolet Wavelength
• Measurement of Resist Transmittance at Extreme Ultraviolet Wavelength Using the Extreme Ultraviolet Reflectometer(Instrumentation, Measurement, and Fabrication Technology)
• Superconducting Bi_2Sr_2Ca_1Cu_2O_ Glass-Ceramics with Different Melting Histories
• Quantitative Analysis of Surface Contaminations on Si Wafers by Total Reflection X-Ray Fluorescence
• Measurement of Organic Matter on Si Wafer by Thermal Desorption Spectroscopy
• Growth of Native Oxide and Accumulation of Organic Matter on Bare Si Wafer in Air
• Study of Si Etch Rate in Various Composition of SC1 Solution
• Selective Reaction of Ferrocene with Si(111) Using a CaF Mask
• Epitaxial Growth of CaF_2 Films on Si(111) Studied by Scanning Tunneling Microscopy(Surfaces, Interfaces, and Films)
• Sample Preparation and Photoluminescence of ZnO Particles Embedded in Thin Alkali Halide Crystals
• Simulation Method for Buried Oxide Formation of Separation by Implanted Oxygen Structure during Post-Implantation Thermal Annealing
• Detection of Bulk Microdefects underneath the Surface of Si Wafer Using Infrared Light Scattering Tomography
• Electron Tunneling Through an A1_2O_3 Thin Film on NiAl(110) in Scanning Tunneling Microscopy
• Surface Modification of Si_3N_4-Coated Silicon Plate for Investigation of Living Cells
• Thermal Denaturation of Plasmid DNA Observed by Atomic Force Microscopy
• Calculation of Diffusion Component of Leakage Currentin pn Junctions Formed in Various Types of Silicon Wafers (Intrinsic Gettering, Epitaxial, Silicon on Insulator)
• X-Ray Photoemission Study of the Oxidation process at Cleaved (110) Surfaces of GaAs, GaP and InSb
• Anomalous Enhancement of Scanning Tunneling Microscope-Excited Light Emission from Gold Films on Graphite Substrate
• Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing
• Numerical Study on Shape Transformation of Silicon Trenches by High-Temperature Hydrogen Annealing
• Alternating Current of Scanning Tunneling Microscope for Organic Molecules Adsorbed on Metal in Terms of Equivalent Circuit of Scanning Tunneling Microscope
• Atomic Force Microscopy Observation of Deoxyribonucleic Acid Stretched and Anchored onto Aluminum Electrodes
• Quantum Yield of Electron-Beam Induced Decomposition of SiO2 Overlay on Si in Nanolithography Using a Scanning Tunneling Microscope
• Micropatterning of Si Surface with Protein Molecules by the AFM Anodic Oxidation Method

もっと見る 閉じる

スポンサーリンク