Scaling Analysis of SiO_2/Si Interface Roughness by Atomic Force Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-01-30
著者
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IWASAKI Hiroshi
The Institute of Scient4fic and Industrial Research, Osaka University
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YOSHINOBU Tatsuo
The Institute of Scientific and Industrial Research, Osaka University
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Yoshinobu T
Osaka Univ. Osaka Jpn
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Yoshinobu Tatsuo
The Institute Of Scientific And Industrial Research Osaka University
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IWAMOTO Atsushi
The Institute of Scientific and Industrial Research, Osaka University
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Iwamoto Atsushi
The Institute Of Scientific And Industrial Research Osaka University
関連論文
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