Decrease in Ozone Density of Atmospheric Surface-Discharge Plasma Source

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概要

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• A surface-discharge plasma source based on dielectric barrier discharge (DBD) has been developed for use in sterilization and cleaning. In these processes, ozone-generation ability is one of the key factors in regard to atmospheric plasma sources. However, it was observed that ozone density decreased during plasma discharge. It is known that an increase in gas temperature decreases the ozone density; thus, the gas temperature in plasma was measured from the rotational temperature of nitrogen molecules. It was confirmed that the gas temperature increases in the case that the ozone density decreases. A dielectric-surface temperature of the plasma source was also measured and its behavior agreed with that of the gas temperature since the thickness of the plasma was small. It is thus confirmed that cooling the dielectric surface of the plasma source is important to increase the ozone density in a surface-discharge plasma source.

• 2012-08-25

著者

• KOBAYASHI Hiroyuki

  Central Research Institute, Mitsubishi Materials Corporation

• Suzuki Keizo

  Central Research Laboratory Hitachi Limited

• Negishi Nobuyuki

  Central Research Laboratory, Hitachi Ltd., 1-280 Higashikoigakubo, Kokubunji, Tokyo 185-8601, Japan

• Negishi Nobuyuki

  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

• Nagaishi Hideyuki

  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

• Tandou Takumi

  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

• Kobayashi Hiroyuki

  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

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