Positive Charges and E' Centers Formed by Vacuum Ultraviolet Radiation in SiO_2 Grown on Si : Beam-Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Suzuki K

  School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science

• Suzuki K

  Ntt Transmission Systems Laboratories Lightwave Communications Laboratory

• Suzuki K

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Suzuki K

  Department Of Information And Communication Technology Tokai University

• SUZUKI Keizo

  Central Research Laboratory, Hitachi, Ltd.

• Nishimatsu Shigeru

  Central Research Laboratory, Hitachi, Ltd.

• MIZUTANI Tatsumi

  Central Research Laboratory, Hitachi, Ltd

• Yokogawa K

  National Institute Of Advanced Industrial Science And Technology (aist) Aist-chugoku

• Yokogawa Kiyoshi

  Institute For Structural And Engineering Materials National Institute Of Advance Industrial Science

• YAJIMA Yusuke

  Central Research Laboratory, Hitachi, Ltd.

• Mizutani Tatsumi

  Central Reseach Laboratory Hitachi Ltd.

• Nishimatsu S

  Central Research Laboratory Hitachi Ltd.

• Nishimatsu Shigeru

  Central Research Laboratory Hitachi Lid.

• Yajima Y

  Ibaraki Univ. Mito Jpn

• Yajima Yusuke

  Central Research Laboratory Hitachi Ltd.

• Suzuki Keizo

  Central Research Laboratory Hitachi Limited

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