Growth of Diamond Thin Films by dc Plasma Chemical Vapor Deposition and Characteristics of the Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-01-20

著者

• Suzuki K

  Ntt Transmission Systems Laboratories Lightwave Communications Laboratory

• Suzuki K

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• SAWABE Atsuhito

  Department of Electrical Engineering and Electronics, Aoyama-Gakuin University

• Suzuki K

  Department Of Information And Communication Technology Tokai University

• Sawabe A

  Aoyama‐gakuin Univ. Tokyo Jpn

• SUZUKI Kazuhiro

  Kyoei Plastic Company

• INUZUKA Tadao

  Department of Electrical Engineering and Electronics, Aoyama-Gakuin University

• SAWABE Atsuhito

  R & D Center, Toshiba Corporation

• INUZUKA Tadao

  Aoyama Gakuin University

• Inuzuka T

  Department Of Electrical Engineering And Electronics Aoyama-gakuin University

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