Analysis of Non-Uniform Boron Penetration of Nitrided Oxide in PMOSFETs Considering Two-Dimensional Nitrogen Distribution

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• Suzuki K

  School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science

• Suzuki Kenji

  Institute For Materials Research Laboratory Tohoku University

• OHKUBO Satoshi

  Fujitsu Laboratories Ltd.

• SUZUKI Kunihiro

  Fujitsu Laboratories Ltd.

• Suzuki K

  Central Research Laboratory Alps Electric Co. Ltd.

• Suzuki Kenshu

  Division Of Public Health Department Of Social Medicine Nihon University School Of Medicine

• AOYAMA Takahiro

  Daihen Co.

• NAKASHIMA Hisao

  The Institute of Scientific and Industrial Research, Osaka University

• Suzuki K

  Ntt Transmission Systems Laboratories Lightwave Communications Laboratory

• Aoyama T

  Hitachi Ltd. Ibaraki Jpn

• AOYAMA Takayuki

  Fujitsu Laboratories Lid.

• Suzuki K

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• FUKUTOME Hidenobu

  Fujitsu Laboratories Ltd.

• TASHIRO Hiroko

  Fujitsu Laboratories Ltd.

• TADA Yoko

  Fujitsu Laboratories Ltd.

• ARIMOTO Hiroshi

  Fujitsu Laboratories Ltd.

• HORIUCHI Kei

  Fujitsu Laboratories Ltd.

• HASEGAWA Sigehiko

  The Institute of Scientific and Industrial Research, Osaka University

• Suzuki K

  Department Of Information And Communication Technology Tokai University

• ARIMOTO Hiroshi

  Semiconductor Leading Edge Technologies

• Tada Y

  Fujitsu Laboratories Ltd.

• Horiuchi K

  Fujitsu Laboratories Ltd.

• Horiuchi Kei

  Fujitsu Laboratories

• Ohkubo Shuichi

  Ulsi Technology Laboratory Fujitsu Laboratories Ltd.

• Tashiro H

  Research And Development Center Ricoh Company Ltd.

• Suzuki K

  東京大学大学院農学生命科学研究科獣医病理学研究室

• Fukutome Hidenobu

  Fujitsu Laboratories Ltd. Silicon Technologies Laboratories Advanced Cmos Technology Lab.

• Arimoto H

  Semiconductor Leading Edge Technologies Inc.

• Arimoto Hiroshi

  Fujitsu Laboratories Limited

• Hasegawa Sigehiko

  The Institute Of Scientific And Industrial Research Osaka University

• Nakashima Hisao

  The Institute Of Scientific And Industrial Research Osaka University

• Tashiro Hideo

  Riken

• Suzuki Kunihiro

  Fujitsu Laboratories Limited., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, Japan

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