Mechanism of Radiation Damage in SiO_2/Si Induced by vuv Photons : Beam-Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Suzuki K

  School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science

• Suzuki K

  Ntt Transmission Systems Laboratories Lightwave Communications Laboratory

• Suzuki K

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Suzuki K

  Department Of Information And Communication Technology Tokai University

• SUZUKI Keizo

  Central Research Laboratory, Hitachi, Ltd.

• TSUJIMOTO Kazunori

  Central Research Laboratory, Hitachi, Ltd.

• Yunogami T

  Extreme Energy-density Research Institute Nagaoka University Of Technology

• YUNOHGAMI Takashi

  Central Research Laboratory, Hitachi, Ltd

• MIZUTANI Tatsumi

  Central Research Laboratory, Hitachi, Ltd

• Mizutani Tatsumi

  Central Reseach Laboratory Hitachi Ltd.

• Tsujimoto Kazunori

  Central Research Laboratory Hitachi Ltd

• Suzuki Keizo

  Central Research Laboratory Hitachi Limited

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