Characterization of μc-Si:H Prepared by Photo-Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Microcrystalline silicon deposited by photo-CVD is characterized to reveal dependence of crystallinity on the film preparation conditions. The volume fraction of microcrystalline (X_c) depends strongly on the dilution ratio of silane gas by hydrogen gas and substrate temperature (T_s) of deposition, while the grain size (δ) of the microcrystalline is kept conslant irrespective of deposition condition. Preferred orientation changes from (110) to (111) with increasing X_c.
- 社団法人応用物理学会の論文
- 1986-08-20
著者
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Suzuki Tadashi
Department Of Medicine And Biological Science Graduate School Of Medicine University Of Gunma
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Suzuki Kazuhiko
Department of Veterinary Pathology, Graduate School of Agricultural and Life Sciences, The Universit
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Suzuki K
Ntt Transmission Systems Laboratories Lightwave Communications Laboratory
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Suzuki K
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Suzuki K
Department Of Information And Communication Technology Tokai University
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Tarui Y
National Institute Of Advanced Industrial Science And Technology
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Tarui Yasuo
Department Of Electric Engineering Tokyo University Of Agriculture & Technology
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Aota Katsumi
Department Of Electronic Engineering Faculty Of Technology Tokyo University Of Agriculture And Techn
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Aota Katsumi
Department Of Electronic Engineering Faculty Of Technology Tokyo University Of Agriculture & Tec
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Kuroiwa K
Faculty Of Technology Tokyo University Of Agricuture And Technology
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TARUI Yasuo
National Institute of Advanced Industrial science and Technology
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Kuroiwa Koichi
Department Of Electrical And Electronic Engineering Tokyo University Of Agriculture And Technology
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AIHARA Takaaki
Department of Electronic Engineering, Faculty of Technology, Tokyo University of Agriculture and Tec
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Aihara Takaaki
Department Of Electronic Engineering Faculty Of Technology Tokyo University Of Agriculture And Techn
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Suzuki Tadashi
Department Of Biology Tokyo Metropolitan University
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Suzuki Kazuhiko
Department Of Electrical Engineering Hokkaido Institute Of Technology
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Suzuki Tadashi
Department Of Biology Faculty Of Science Tokyo Metropolitan University
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Suzuki Tadashi
Department Of Electronic Engineering Faculty Of Technology Tokyo University Of Agriculture And Techn
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