Mechanism of E' Center Generation in SiO_2 Film by Ion and Neutral Beam Bombardment : Beam Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• Ninomiya Kunimoto

  New Materials Research Center Sanyo Electric Co. Ltd.

• Ninomiya Kunimoto

  Functional Materials Research Center Sanyo Electric Co. Ltd.

• NINOMIYA Ken

  Central Research Laboratory, Hitachi, Ltd.

• Ninomiya K

  Central Research Laboratory

• Ninomiya Ken

  Central Research Laboratory Hitachi Ltd.

• Nishimatsu Shigeru

  Central Research Laboratory, Hitachi, Ltd.

• MIZUTANI Tatsumi

  Central Research Laboratory, Hitachi, Ltd

• Yokogawa K

  National Institute Of Advanced Industrial Science And Technology (aist) Aist-chugoku

• Yokogawa Kiyoshi

  Institute For Structural And Engineering Materials National Institute Of Advance Industrial Science

• YAJIMA Yusuke

  Central Research Laboratory, Hitachi, Ltd.

• Mizutani Tatsumi

  Central Reseach Laboratory Hitachi Ltd.

• Nishimatsu S

  Central Research Laboratory Hitachi Ltd.

• Nishimatsu Shigeru

  Central Research Laboratory Hitachi Lid.

• Yajima Y

  Ibaraki Univ. Mito Jpn

• Yajima Yusuke

  Central Research Laboratory Hitachi Ltd.

• NINOMIYA Ken

  Central Research Laboratory

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