Preparation and Properties of a-Si Films Deposited at a High Deposition Rate under a Magnetic Field
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-01-20
著者
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NAKAMURA Naoto
Department of Information Processing, Tokyo Institute of Technology
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Tanaka M
Production Engineering Research Laboratory Hitachi Ltd.
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Nakamura Nobuo
Central Research Laboratory Hitachi Ltd.
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Nakano Shoichi
Department Of Physiology Tokai University School Of Medicine
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Nakamura N
Tokyo Inst. Technol. Yokohama Jpn
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Tsuda Shinya
R&d Headquarters Sanyo Electric Co. Ltd.
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KUWANO Yukinori
Functional Materials Research Center, Sanyo Electric Co., Ltd.
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TSUDA Shinya
Research Center, Sanyo Electric Co., Ltd.
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KUWANO Yukinori
Research Center, Sanyo Electric Co., Ltd.
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Nakamura Noboru
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Tanaka M
Manufacturing Development Center Mitsubishi Electric Corporation
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Tanaka M
Toshiba Corp. Kawasaki Jpn
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Nakamura Nobuhiro
Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute
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Ninomiya Kunimoto
New Materials Research Center Sanyo Electric Co. Ltd.
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Ninomiya Kunimoto
Functional Materials Research Center Sanyo Electric Co. Ltd.
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Nishiwaki Hidenori
New Materials Research Center Sanyo Electric Co. Ltd.
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Nishiwaki Hidenori
Functional Materials Research Center Sanyo Electric Co. Ltd.
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TANAKA MAKOTO
Research Center, Taisho Pharmaceutical Co., Ltd.
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OSUMI Masato
SANYO Electric Co., Ltd.
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NAKANO Shoichi
Research Center, SANYO Electric Co., Ltd.
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NAKAMURA Noboru
Research Center, SANYO Electric Co., Ltd.
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NISHIWAKI Hidenori
Research Center, SANYO Electric Co., Ltd.
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OHNISHI Michitoshi
Applied Research Center, SANYO Electric Co., Lid.
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Tanaka M
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Nakamura N
Department Of Information Processing Tokyo Institute Of Technology
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Ninomiya K
Central Research Laboratory
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Kuwano Y
Technical Res. Lab. Kawasaki Jpn
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Kuwano Yukinori
Research And Development Center Sanyo Electric Co. Ltd.
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UCHIHASHI Kenji
Research Center, SANYO Electric Co., Ltd.
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YOSHIDA Kazuhiro
Research Center, SANYO Electric Co., Ltd.
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NINOMIYA Kunimoto
Research Center, SANYO Electric Co., Ltd.
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NISHIKUNI Masato
Research Center, SANYO Electric Co., Ltd.
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YAZAKI Takehito
Applied Research Center, SANYO Electric Co., Ltd.
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Yazaki T
Kddi R&d Lab. Inc. Saitama Jpn
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Uchihashi Kenji
Research Center Sanyo Electric Co. Ltd.
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Ohnishi Michitoshi
Sony Corporation Research Center
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Yoshida Kazuhiro
Research Center Sanyo Electric Co. Ltd.
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Nishikuni Masato
Functional Materials Research Center Sanyo Electric Co. Ltd.
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TANAKA Makoto
Research Center, Taisho Pharmaceutical Co., Ltd
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