Direct Observation of a-Si:H/a-Si_<1-x>C_x:H Multilayers and Their Electrical Properties : Surfaces, Interfaces and Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1988-01-20

著者

• Shimada Toshikazu

  Electronics Research Laboratory Nissan Motor Co. Ltd.

• NAKAMURA Naoto

  Department of Information Processing, Tokyo Institute of Technology

• Itoh Hisayoshi

  Institute Of Materials Science University Of Tsukuba

• Nakamura Nobuo

  Central Research Laboratory Hitachi Ltd.

• Nakamura N

  Tokyo Inst. Technol. Yokohama Jpn

• Itoh H

  Semiconductor Academic Research Center

• Nakamura Noboru

  Functional Materials Research Center Sanyo Electric Co. Ltd.

• SHIMADA Toshikazu

  Central Research Laboratory, Hitachi Ltd.

• MURAMATSU Shin-ichi

  Central Research Laboratory

• Itoh Hitoshi

  Semiconductor Academic Research Center

• Nakamura Nobuhiro

  Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute

• Nakamura N

  Department Of Information Processing Tokyo Institute Of Technology

• Muramatsu S

  Univ. Tokyo Tokyo Jpn

• SHIMOTSU Teruho

  Central Research Laboratory, Hitachi Ltd.

• MATSUBARA Sunao

  Central Research Laboratory, Hitachi Ltd.

• ITOH Haruo

  Central Research Laboratory, Hitachi Lid.

• Matsubara Sunao

  Central Research Laboraotry

• Shimada T

  Presto Japan Science And Technology Corporation (jst) And Department Of Chemistry The University Of

• Muramatsu S

  Hitachi Cable Ltd. Ibaraki Jpn

• Shimotsu Teruho

  Central Research Laboratory Hitachi Ltd.

• Shimada Toshikazu

  Central Research Laboratory

• Itoh Haruo

  Central Research Laboratory Hitachi Ltd.

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