Preparation of Tetragonal Perovskite Single Phase PbTiO_3 Film Using an Improved Metal-Organic Chemical Vapor Deposition Method Alternately Introdueing Pb and Ti Precursors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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Shimada Toshikazu
Electronics Research Laboratory Nissan Motor Co. Ltd.
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Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
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Hirai T
Tohoku Univ. Sendai‐shi
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Hirai Toshihiro
Material Development Research Laboratory Nippon Mining Co. Lid.
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Tarui Yasuo
The School of Science and Engineering, Waseda University
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Hirai T
Canon Inc. Tokyo Jpn
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TARUI Yasuo
National Institute of Advanced Industrial science and Technology
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HIRAI Tadahiko
LSI Laboratories, Asahi Chemical Industry Co., Ltd.
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TANIMOTO Satoshi
Electronics Research Laboratory, Nissan Motor Co., Ltd.
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MATSUHASHI Hideki
Department of Electronic Engineering, Tokyo University of Agriculture and Technology
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Shimada T
Presto Japan Science And Technology Corporation (jst) And Department Of Chemistry The University Of
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Matsuhashi Hideki
Department Of Electronic Engineering Tokyo University Of Agriculture And Technology
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Tanimoto Satoshi
Electronics Research Laboratory Nissan Motor Co. Ltd.
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Tarui Yasuo
The School Of Science And Engineering Waseda University
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Goto Takaaki
Department Of Developmental Disorders National Institute Of Mental Health National Center Of Neurology And Psychiatry
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