Generation Mechanism of Tensile Stress in a-Si_<1-x>N_x Films Prepared by Afterglow Plasma Chemical Vapor Deposition Technique
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-11-15
著者
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Shimada Toshikazu
Electronics Research Laboratory Nissan Motor Co. Ltd.
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Kurihara Koji
Faculty Of Technology Tokyo University Of Agricuture And Technology
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UENO Tomo
Faculty of Technology, Tokyo University of Agriculture and Technology
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NAGAYOSHI Hiroshi
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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UENO Tomo
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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KAMISAKO Koichi
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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KUROIWA Koichi
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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SHIMADA Toshikazu
Central Research Laboratory, Hitachi Ltd.
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TARUI Yasuo
Division of Electronic and Information Engineering, Faculty of Technology, Tokyo University of Agric
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Hoe WONG
Division of Electronic and Information Engineering, Faculty of Technology,Tokyo University of Agricu
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NAGAYOSHI Hiroshi
Faculty of Technology, Tokyo University of Agriculture and Technology
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Hoe W
Tokyo Univ. Agriculture And Technology Tokyo
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Ueno T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Ueno Tomo
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Tarui Yasuo
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Kamisako K
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Kuroiwa K
Faculty Of Technology Tokyo University Of Agricuture And Technology
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TARUI Yasuo
National Institute of Advanced Industrial science and Technology
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Shimada T
Presto Japan Science And Technology Corporation (jst) And Department Of Chemistry The University Of
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Kamisako Koichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Nagayoshi H
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Shimada Toshikazu
Central Research Laboratory
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