Effect of Deuterium Anneal on SiO_2/Si(100) Interface Traps and Electron Spin Resonance Signals of Ultrathin SiO_2 Films

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-04-15

著者

• OHDOMARI Iwao

  School of Science and Engineering, Waseda University

• Kawarada Hiroshi

  School Of Science And Engineering Waseda University

• Kawarada Hiroshi

  School Of Science & Engineering Waseda University

• 大泊 巌

  早大理工

• Ohdomari Iwao

  School Of Science And Engineering Waseda University

• Ohdomari Iwao

  School Of Science And Engineering Waseda University:kagami-memorial Laboratory For Materials Science

• FUKUDA Hisashi

  Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.

• UENO Tomo

  Faculty of Technology, Tokyo University of Agriculture and Technology

• Kawarada H

  School Of Science And Engineering Waseda University

• Ueno T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Fukuda Hisashi

  Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.

• Kawarada Hiroshi

  Nanotechnology Research Center Waseda University

• Fukuda Hisashi

  Semiconductor Technology Laboratory Oki Electric Industry Co. Lid.

• Ueno Tomo

  Faculty Of Technology Tokyo University Of Agriculture And Technology

関連論文

• A Novel Process for Fabrication of Gated Silicon Field Emitter Array Taking Advantage of Ion Bombardment Retarded Etching
• Si(111)-n×n構造についての新しい実験事実とその解釈
• 周期的な不純物原子配列を有する半導体の電気伝導シミュレーション(プロセス・デバイス・回路シミュレーション及び一般)
• ナノ開口基板を用いたシャペロニンGroELの1分子機能解析
• 1P088 ナノ開口を用いた弱い生体分子間相互作用の1分子検出(蛋白質 E) 計測・解析の方法論)
• 周期的な不純物原子配列を有する半導体の電気伝導シミュレーション(プロセス・デバイス・回路シミュレーション及び一般)
• シングルイオン注入法を用いたナノスケール表面改質
• 25aP-5 ナノスケール一次元伝導体の伝導特性
• 24pYM^ / 24pYM-9 微細化電荷密度波の形成とその伝導特性
• 27a-YK-8 イオンビームによるCDWの一次元化とその伝導機構
• 歪Siナノワイヤトランジスタにおけるトランスコンダクタンスエンハンスメント(ゲートスタック構造の新展開(II),ゲート絶縁膜,容量膜,機能膜及びメモリ技術)
• 2908 Luciferase-Si基板間相互作用の分子動力学シミュレーション(OS-29B,OS-29 生体高分子の動力学シミュレーション)
• 生体分子-半導体表面間相互作用の分子動力学シミュレーション(S24-1 バイオ・ナノ流動ダイナミクス(1),S24 バイオ・ナノ流動ダイナミクス)
• Holes in the Valence Band of Superconducting Boron-Doped Diamond Film Studied by Soft X-ray Absorption and Emission Spectroscopy(Condensed matter : electronic structure and electrical, magnetic, and optical properties)
• Hybridization of Deoxyribonucleic Acid and Immobilization of Green Fluorescent Protein on Nanostructured Organosilane Templates
• Multiresolution Model Construction from Scattered Range Data by Hierarchical Cube-Based Segmentation
• 4. 先端放電型マイクロ波プラズマCVDによる単層カーボンナノチューブ配向成長(プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題)
• Effects of Plasma Potential on Diamond Deposition at Low Pressure Using Magneto-Microwave Plasma Chemical Vapor Deposition
• Low-Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD
• The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD
• Electron Beam Lithography on Organosilane Self-Assembled Monolayer Resist
• Effect of Deuterium Anneal on SiO_2/Si(100) Interface Traps and Electron Spin Resonance Signals of Ultrathin SiO_2 Films
• Fabrication of T-Shaped Gate Diamond Metal-Insulator-Semiconductor Field-Effect Transistors
• RF Performance of Diamond Surface-Channel Field-Effect Transistors(Heterostructure Microelectronics with TWHM2003)
• High Frequency Diamond FETs Utilizing Hydrogen-Terminated Surface Channel
• High-Resolution Electron Microscope Study of Silicon on Insulator Structure Grown by Lateral Solid Phase Epitaxy
• Structural Study of PtSi/(111)Si Interface with High-Resolution Electron Microscopy
• Blue and Green Cathodoluminescence of Synthesized Diamond Films Formed by Plasma-Assisted Chemical Vapour Deposition : Optical Properties of Condensed Matter
• Characterization of Diamond Particles and Films Formed by Plasma-Assisted Chemical Vapour Deposition Using High-Voltage Electron Microscopy
• Large Area Chemical Vapour Deposition of Diamond Particles and Films Using Magneto-Microwave Plasma
• 5a-T-3 酸素吸着モデルで考えたSi(111)7x7超構造のTED解析
• 28pSL-7 Cooper pairの熱的安定化による原子核の安定化
• 29a-B-2 超伝導相転移の前駆状態を形成する高温磁気相転移
• Cu/CaF_2/Diamond Metal-Insulator-Semiconductor Field-Effect Transistor Utilizing Self-Aligned Gate Fabrication Process
• High-Performance Diamond Metal-Semiconductor Field-Effect Transistor with 1 μm Gate Length
• Probability of Atomic or Molecular Oxygen Species in Silicon Silicon Dioxide
• Diffusion of Molecular and Atomic Oxygen in Silicon Oxide
• Fabrication of Adenosine Triphosphate-Molecule Recognition Chip by Means of Bioluminous Enzyme Luciferase : Cross-Disciplinary Areas
• Nucleation and Growth of Cu Adsorbates on Hydrogen-Terminated Si(111) Surface in Solution
• Nonscalability of Alpha-Particle-Induced Charge Collection Area
• Reverse-Mode Single Ion Beam Induced Charge (R-mode SIBIC) Imaging for the Test of Total Dose Effects in n-ch Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET)
• {111} Facet Formation during Lateral Solid-Phase Epitaxy of Silicon
• Analysis of Interactions between Green Fluorescent Protein and Silicon Substrates Using Molecular Dynamics Simulations
• Large-Scale Atomistic Modeling of Thermally Grown SiO_2 on Si(111) Substrate
• Effects of Thermal History on Residual Order of Thermally Grown Silicon Dioxide
• Novel Interatomic Potential Energy Function for Si, O Mixed Systems
• Fabrication of ultrathin Si Channel Wall For Vertical Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistor (DG MOSFET) by Using Ion-Bombardment-Retarded Etching (IBRE)
• 7a-E-9 イオンビームによる一次元化CDWダイナミクス
• Impact of Structural Strained Layer near SiO_2/Si Interface on Activation Energy of Time-Dependent Dielectric Breakdown
• Dominant Role of Corner Holes in the Decomposition Process of Silicon Islands on Si(111) Surfaces
• Consideration on the Quantitativeness of Reflection High Energy Electron Diffraction Intensity as a Tool to Monitor the Coverage of the Si(111) Surface by 7×7 Domains
• High-Temperature Scanning Tunneling Microscopy (STM) Observation of Metastable Structures on Quenched Si (111) Surfaces
• これからの産学協働のあり方
• シリコンナノ構造配列の作製とバイオアプリケーション (特集 分子レベル制御による高機能表界面の構築)
• 学際融合研究と人材育成
• ナノテクノロジーの現状と課題(映像情報メディアにおけるナノテクノロジー)
• 第7回原子スケール制御表面界面・ナノ構造国際会議(ACSIN-7)報告
• ナノテクノロジーと化学
• ナノテクノロジーに日本再生を託そう
• 分子動力学法によるシリコン酸化膜の大規模モデリング
• Influence of Near-Surface Defects in Si Induced by Reactive Ion Etching on the Electrical Properties of the Pt/n-Si Interface
• Estimation of Spatial Extent of a Defect Cluster in Si Induced by Single Ion lrradiation
• Single-Event Upset Test of Static Random Access Memory Using Single-Ion Microprobe
• Site Dependence of Soft Errors Induced by Single-Ion Hitting in 64 kbit Static Random Access Memory (SRAM)
• Low Temperature Synthesis of Extremely Dense and Vertically Aligned Single-Walled Carbon Nanotubes
• Si Island Formation on Domain Boundaries Induced by Ar Ion Irradiation on High-Temperature Si(111)-7 × 7 Dimer-Adatom-Stacking Fault Surfaces
• Electron Affinity and Surface Re-ordering of Homoepitaxial Diamond (100)
• Reconstruction of 3D Object from Scattered Range Data by using Spatial Uniform Segmentaion (3D画像関連技術論文)
• RF Diamond Transistors : Current Status and Future Prospects
• Diamond MISFETs for High Frequency Applications
• Electric Properties of Metal/Diamond Interfaces Utilizing Hydrogen-Terminated Surfaces of Homoepitaxial Diamonds
• Nanoscale Modification of the Hydrogen-Terminated Diamond Surface Using Atomic Force Microscope
• Fabrication of Single Electron Transistors on Hydrogen-Terminated Diamond Surface Using Atomic Force Microscope
• Nanofabrication on Hydrogen-Terminated Diamond Surfaces by Atomic Force Microscope Probe-Induced Oxidation
• Surface Order Evaluation of the Heteroepitaxial Diamond Film Grown on an Inclined β-SiC(001)
• Soft X-ray Core-Level Photoemission Study of Boron Sites in Heavily Boron-Doped Diamond Films(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Electrically Isolated Metal-Semiconductor Field Effect Transistors and Logic Circuits on Homoepitaxial Diamonds
• Investigation of Current-Voltage Characteristics of Oxide Region Induced by Atomic Force Microscope on Hydrogen-Terminated Diamond Surface
• RF Performance of High Transconductance and High-Channel-Mobility Surface-Channel Polycrystalline Diamond Metal-Insulator-Semiconductor Field-Effect Transistors
• Effect of Cl^- Ionic Solutions on Electrolyte-Solution-Gate Diamond Field-Effect Teansistors
• Microwave Performance of Diamond Field-Effect Transistors
• Anneal Behavior of Aluminum-Implanted Germanium
• Interface Reaction of SiO_2 and GaAs during High-Temperature Heat-Treatments
• Analysis of Atomic-Scale Structure of Microtwins in L-SPE Si by Modeling
• Solid State Reaction of Mo on Cubic and Hexagonal SiC
• Carrier Generation in Germanium Implanted with Aluminum at Room Temperature
• Electrical Properties of Carbon Nanotubes Grown at a Low Temperature for Use as Interconnects
• High Frequency Performance of Diamond Field-Effect Transistor
• Temperature and Incident Beam-Current Dependence of Dominant Free-Exciton Recombination Radiation from High-Purity Chemical Vapor Deposition (CVD) Diamonds
• Low-Pressure Diamond Nucleation and Growth on Cu Substrate
• Effect of Electron and Neutron Irradiation on the Cathodoluminescence of Nitrogen-Doped CVD Diamond
• Characterization of Hybridization on Diamond Solution-Gate Field-Effect Transistors for Detecting Single Mismatched Oligonucleotides
• High-Performance P-Channel Diamond Metal--Oxide--Semiconductor Field-Effect Transistors on H-Terminated (111) Surface
• Initial Growth of Heteroepitaxial Diamond on Si(001) Substrates via β-SiC Buffer Layer
• Structure of Chemical Vapor Deposited Diamond (111) Surfaces by Scanning Tunneling Microscopy
• High-Current Metal Oxide Semiconductor Field-Effect Transistors on H-Terminated Diamond Surfaces and Their High-Frequency Operation
• High Priority of Nanocrystalline Diamond as a Biosensing Platform
• RF Diamond Transistors: Current Status and Future Prospects
• Surface-modified Diamond Field-effect Transistors for Enzyme-immobilized Biosensors
• Fabrication of T-Shaped Gate Diamond Metal–Insulator–Semiconductor Field-Effect Transistors

もっと見る 閉じる

スポンサーリンク