Microwave Performance of Diamond Field-Effect Transistors
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概要
- 論文の詳細を見る
The microwave performance of diamond metal semiconductor field-effect transistors (MESFET) and metal insulator semiconductor field-effect transistors (MISFET) fabricated on hydrogen-terminated diamond surface is investigated. A cut-off frequency of 2.2GHz is obtained on a 2μm Cu gate MESFET with a transconductance of 70mS/mm. A cut-off frequency of 11GHz is obtained on a 0.7μm gate MISFET with a transconductance of 40mS/mm. Despite the lower transconductance, the cut-off frequency of MISFET is higher than that of MESFET due to not only gate minimization but also increased carrier mobility due to the use of CaF_2 as the gate insulator. High-frequency equivalent circuits are derived from S-parameters for MISFET with various gate lengths. Reduction of gate-source parasitic resistance and capacitance in MISFET by the improvement of device structure yield high frequency performance. [DOI: 10.1143/JJAP.41.2591]
- 社団法人応用物理学会の論文
- 2002-04-30
著者
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Kawarada Hiroshi
School Of Science And Engineering Waseda University
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Kawarada Hiroshi
School Of Science & Engineering Waseda University
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UMEZAWA Hitoshi
National Institute of Advanced Industrial Science and Technology (AIST)
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UMEZAWA Hitoshi
School of Science and Engineering
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ISHIZAKA Hiroaki
School of Science and Engineering
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TANIUCHI Hirotada
School of Science and Engineering, Waseda University
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Kawarada H
School Of Science And Engineering Waseda University
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Tachiki Minoru
School Of Science And Engineering:crest Jst (japan Science And Technology Corporation)
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Takeuchi Daisuke
Energy Technology Research Institute National Institute Of Advanced Industrial Science And Technolog
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Tachiki M
Energy Technology Research Institute National Institute Of Advanced Industrial Science And Technolog
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Umezawa H
Core Research For Evolutional Science And Technology (crest) Japan Science And Technology Corporatio
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Kawarada Hiroshi
Nanotechnology Research Center Waseda University
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Ishizaka Hiroaki
School Of Science And Engineering:crest Jst (japan Science And Technology Corporation)
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Taniuchi Hirotada
School Of Science And Engineering Waseda University
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Umezawa Hitoshi
School Of Science And Engineering Waseda University:crest Jst (japan Science And Technology Corporation)
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