Large Area Chemical Vapour Deposition of Diamond Particles and Films Using Magneto-Microwave Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-06-20

著者

• Kawarada Hiroshi

  School Of Science & Engineering Waseda University

• Mar King

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• HIRAKI Akio

  Faculty of Engineering, Osaka University

• Hiraki Akio

  Faculty Of Engineering Osaka University

• KAWARADA Hiroshi

  Faculty of Engineering, Osaka,University

• MAR King

  Faculty of Engineering, Osaka University

• Kawarada H

  School Of Science And Engineering Waseda University

• Hiraki A

  Kochi Univ. Technol. Kochi‐ken Jpn

• Kawarada Hiroshi

  Nanotechnology Research Center Waseda University

関連論文

• Holes in the Valence Band of Superconducting Boron-Doped Diamond Film Studied by Soft X-ray Absorption and Emission Spectroscopy(Condensed matter : electronic structure and electrical, magnetic, and optical properties)
• Multiresolution Model Construction from Scattered Range Data by Hierarchical Cube-Based Segmentation
• Effects of Plasma Potential on Diamond Deposition at Low Pressure Using Magneto-Microwave Plasma Chemical Vapor Deposition
• Low-Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD
• The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD
• Homoepitaxial Diamond Synthesis by DC Arc Plasma Jet Chemical Vapor Deposition
• Effect of Deuterium Anneal on SiO_2/Si(100) Interface Traps and Electron Spin Resonance Signals of Ultrathin SiO_2 Films
• RF Performance of Diamond Surface-Channel Field-Effect Transistors(Heterostructure Microelectronics with TWHM2003)
• High Frequency Diamond FETs Utilizing Hydrogen-Terminated Surface Channel
• Distribution of Electrode Elements near Contacts and Junction Layers in Amorphous Silicon Solar Cell : III-3: AMORPHOUS SOLAR CELLS (2) : Characterization
• High-Resolution Electron Microscope Study of Silicon on Insulator Structure Grown by Lateral Solid Phase Epitaxy
• Structural Study of PtSi/(111)Si Interface with High-Resolution Electron Microscopy
• Blue and Green Cathodoluminescence of Synthesized Diamond Films Formed by Plasma-Assisted Chemical Vapour Deposition : Optical Properties of Condensed Matter
• Characterization of Diamond Particles and Films Formed by Plasma-Assisted Chemical Vapour Deposition Using High-Voltage Electron Microscopy
• Large Area Chemical Vapour Deposition of Diamond Particles and Films Using Magneto-Microwave Plasma
• Cu/CaF_2/Diamond Metal-Insulator-Semiconductor Field-Effect Transistor Utilizing Self-Aligned Gate Fabrication Process
• High-Performance Diamond Metal-Semiconductor Field-Effect Transistor with 1 μm Gate Length
• Effect of CO_2 Addition on Diamond Growth by DC Arc Plasma Jet Chemical Vapour Deposition
• Origin of Si(LMM) Auger Electron Emission from Silicon and Si-Alloys by keV Ar^+ Ion Bombardment
• Evaluation of Boron and Phosphorus Doping Microcrystalline Silicon Films
• Structure Change of Microcrystalline Silicon Films in Deposition Process
• Growth of Hydrogenated Germanium Microcrystal by Reactive Sputtering
• Auger and X-Ray Analyses of Iron-Oxide-Coated Si Photoelectrodes
• Fabrication of Chalcogenide Amorphous Semiconductor Diodes Using Low Temperature Thermal Diffusion Techniques
• Chalcogenide Amorphous Semiconductor Diodes
• Impurity Effects in Chalcogenide Amorphous Semiconductors by Low-Temperature Diffusion of Metal Ions
• Diffusion Profile of Some Metal Ions in Chalcogenide Amorphous Semiconductors
• Evaluation of Fermi-Level in Doped Films of a-SiC:H by X-Ray Photoemission Spectroscopy
• Normal Atmospheric Preparation of YBa_2Cu_4O_8 Superconductor from Nitrate Solution by Freeze-Drying Method
• High-Quality YBa_2Cu_3O_ Ceramics Prepared from Freeze-Dried Nitrates
• Superconducting YBa_2Cu_O_Particles Prepared from Freeze-Dried Nitrates
• Growth and Characterization of Homogeneous YBa_2Cu_3O_ Powders Prepared by a Freeze-Drying Method
• Growth and Characterization of Carbon Nanowalls(Special Issue on Field Electron Emission from Carbon Materials)
• Seeding Diamond Nanocrystals on Si Substrates for Deposition of Diamond Films(Special Issue on Field Electron Emission from Carbon Materials)
• Growth and Characterization of Diamond Films on SiO_2/Si Substrates
• Low Temperature Synthesis of Extremely Dense and Vertically Aligned Single-Walled Carbon Nanotubes
• Electron Affinity and Surface Re-ordering of Homoepitaxial Diamond (100)
• Reconstruction of 3D Object from Scattered Range Data by using Spatial Uniform Segmentaion (3D画像関連技術論文)
• Diamond MISFETs for High Frequency Applications
• Electric Properties of Metal/Diamond Interfaces Utilizing Hydrogen-Terminated Surfaces of Homoepitaxial Diamonds
• Nanoscale Modification of the Hydrogen-Terminated Diamond Surface Using Atomic Force Microscope
• Fabrication of Single Electron Transistors on Hydrogen-Terminated Diamond Surface Using Atomic Force Microscope
• Nanofabrication on Hydrogen-Terminated Diamond Surfaces by Atomic Force Microscope Probe-Induced Oxidation
• Surface Order Evaluation of the Heteroepitaxial Diamond Film Grown on an Inclined β-SiC(001)
• Soft X-ray Core-Level Photoemission Study of Boron Sites in Heavily Boron-Doped Diamond Films(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Nuclear Magnetic Resonance Study of NaCl Crystal Containing Ca Impurities
• Electrically Isolated Metal-Semiconductor Field Effect Transistors and Logic Circuits on Homoepitaxial Diamonds
• Investigation of Current-Voltage Characteristics of Oxide Region Induced by Atomic Force Microscope on Hydrogen-Terminated Diamond Surface
• RF Performance of High Transconductance and High-Channel-Mobility Surface-Channel Polycrystalline Diamond Metal-Insulator-Semiconductor Field-Effect Transistors
• Effect of Cl^- Ionic Solutions on Electrolyte-Solution-Gate Diamond Field-Effect Teansistors
• Microwave Performance of Diamond Field-Effect Transistors
• Electrical Properties of Carbon Nanotubes Grown at a Low Temperature for Use as Interconnects
• High Frequency Performance of Diamond Field-Effect Transistor
• Temperature and Incident Beam-Current Dependence of Dominant Free-Exciton Recombination Radiation from High-Purity Chemical Vapor Deposition (CVD) Diamonds
• Low-Pressure Diamond Nucleation and Growth on Cu Substrate
• Effect of Electron and Neutron Irradiation on the Cathodoluminescence of Nitrogen-Doped CVD Diamond
• Characterization of Hybridization on Diamond Solution-Gate Field-Effect Transistors for Detecting Single Mismatched Oligonucleotides
• High-Performance P-Channel Diamond Metal--Oxide--Semiconductor Field-Effect Transistors on H-Terminated (111) Surface
• Initial Growth of Heteroepitaxial Diamond on Si(001) Substrates via β-SiC Buffer Layer
• Structure of Chemical Vapor Deposited Diamond (111) Surfaces by Scanning Tunneling Microscopy
• Experimental Determination of Diffusion and Formation Energies of Thermal Vacancies in Germanium
• High-Current Metal Oxide Semiconductor Field-Effect Transistors on H-Terminated Diamond Surfaces and Their High-Frequency Operation
• High Priority of Nanocrystalline Diamond as a Biosensing Platform
• RF Diamond Transistors: Current Status and Future Prospects
• Surface-modified Diamond Field-effect Transistors for Enzyme-immobilized Biosensors
• Micropatterning Oligonucleotides on Single-Crystal Diamond Surface by Photolithography
• Fabrication of T-Shaped Gate Diamond Metal–Insulator–Semiconductor Field-Effect Transistors

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