Seeding Diamond Nanocrystals on Si Substrates for Deposition of Diamond Films(Special Issue on Field Electron Emission from Carbon Materials)
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概要
- 論文の詳細を見る
Seeding substrates with diamond nanocrystals has been considered to be a promising nondestructive pretreatment method for growth of diamond films. However, its application is strongly impeded by the segregation of diamond nanocrystals on substrates. In the present study, we suggest a very simple but effective seeding way ("sandwich" (SW) seeding way) to prevent nanocrystals from segregation. By the SW seeding way, the diamond nanocrystals can be nearly uniformly dispersed on Si substrates with the areal density of the order of 10^8cm^<-2>. On the nano-seeded Si substrates the continuous and homogeneous diamond films can be successfully fabricated using a microwave plasma enhanced chemical-vapor-deposition (MPECVD) equipment. The cross-sectional transmission electron microscopy (TEM) images reveal that compare with the diamond films grown on the Si substrates pretreated by the conventional scratching method, the films deposited on the nano-seeded Si substrates present a much flatter interfacial structure, suggesting that the SW seeding way can effectively reduce the interface coarseness.
- 社団法人電子情報通信学会の論文
- 2003-05-01
著者
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Hiraki A
Faculty Of Engineering University Of The Ryukyus
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JIANG Nan
Department of Electrical and Electronic Engineering, The University of Tokushima
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Jiang N
Department Of Electrical And Electronic Engineering The University Of Tokushima
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Jiang Nan
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Jiang Nan
Department Of Electrical And Electronic Engineering The University Of Tokushima
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SHINTANI Yoshihiro
Department of Electrical and Electronic Engineering, Tokushima University
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NISHIMURA Kazuhito
Kochi Prefectural Industrial Technology Center
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HIRAKI Akio
Kochi University of Technology
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Nishimura Kazumi
Ntt System Electronics Laboratories
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Shintani Yoshihiro
Department Of Electrical And Electronic Engineering The University Of Tokushima
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Hiraki A
Kochi Univ. Technol. Kochi‐ken Jpn
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Nishimura K
Kddi R&d Laboratories Inc.:optical Industry And Technology Development Association
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Shintani Y
Department Of Electrical And Electronic Engineering Tokushima University
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NISHIMURA Kazutoshi
NTT Human Interface Laboratories
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Nishimura Kazuhiro
Department Of Electrical & Electronic Engineering. Toyohashi University Of Technology
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Nishimura K
Kochi Prefectural Industrial Technology Center
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