Energetic O_- Ions and O Atoms in Planar Magnetron Sputtering of ZnO Target
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories:(present Address) Sanyo Electric Co. Ltd.
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Tominaga Koji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Koji
Semiconductor Research Center Sanyo Electric Co. Ltd.
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SHINTANI Yoshihiro
Department of Electrical and Electronic Engineering, Tokushima University
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Shintani Yoshihiro
Department Of Electrical And Electronic Engineering Tokushima University
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Yoshimi S
Tokushima Univ. Tokushima
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Shintani Yoshihiro
Department Of Electrical And Electronic Engineering The University Of Tokushima
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Tominaga K
Kobe Univ. Kobe Jpn
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TOMINAGA Kikuo
Department of Electrical and Electronic Engineering, The University of Tokushima
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SUEYOSHI Yasuhiko
Department of Electrical and Electronic Engineering, The University of Tokushima
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CHONG Munfei
Department of Electrical and Electronic Engineering, The University of Tokushima
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MUNFEI Chong
Department of Electrical and Electronic Engineering, The University of Tokushima
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Shintani Y
Department Of Electrical And Electronic Engineering Tokushima University
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Chong M
Univ. Tokushima Tokushima
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Sueyoshi Yasuhiko
Department Of Electrical And Electronic Engineering The University Of Tokushima
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