Energetic Oxygen Atoms in RF Sputtering of ZnO : T: Thin Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-11-30
著者
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Yuasa Takayuki
Faculty of Agriculture, Kochi University
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Kuroda Kenji
Faculty Of Engineering The University Of Tokushima
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories:(present Address) Sanyo Electric Co. Ltd.
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Tominaga Koji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Koji
Semiconductor Research Center Sanyo Electric Co. Ltd.
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Yuasa T
Advanced Technology Research Laboratories Sharp Corporation
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Yuasa Takayuki
Faculty Of Engineering The University Of Tokushima
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Yuasa Takayuki
Faculty Of Agriculture Kochi University
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Kuroda K
Central Research Laboratory Hitachi Ltd.
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Yuasa T
Researches And Environment Protection Research Laboratories Nec Corporation
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TADA Osamu
Faculty of Engineering, Tokushima University
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TOMINAGA Kikuo
Faculty of Engineering, The University of Tokushima
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Tada O
Faculty Of Engineering The University Of Tokushima
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Tada Osamu
Faculty Of Engineering Tokushima University
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Tada Osamu
Department Of Biology Tokyo University Of Science
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Kuroda K
International Superconductivity And Technol. Center (istec) Tokyo Jpn
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Tominaga K
Kobe Univ. Kobe Jpn
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Tominaga Kikuo
Faculty Of Engineering The University Of Tokushima
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Kuroda Kazuo
Institute Of Industrial Science Umversity Of Tokyo
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