Preparation of C-Axis-Oriented PLT Thin Films by the Metalorganic Chemical Vapor Deposition Method
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概要
- 論文の詳細を見る
La-modified lead titanate (PLT) thin films are prepared by the metalorganic chemical vapor deposition method. Tetraethyl lead, titanium tetraisopropoxide and trisdipivaloylmethanato lanthanum are used as source materials. The films obtained at 600℃ under reduced pressure of 6 Torr constitute PLT of the single perovskite phase, and highly c axis-oriented films are grown on MgO(100). The crystal structures are transferred from the tetragonal to the cubic structure with increasing molar fraction of La_2O_3. The dielectric constant and tan δ are around 800 to 2700 and 0.04 to 0.1.
- 社団法人応用物理学会の論文
- 1990-10-20
著者
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Okada M
Nagoya Univ. Nagoya Jpn
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories:(present Address) Sanyo Electric Co. Ltd.
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Tominaga Koji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Koji
Semiconductor Research Center Sanyo Electric Co. Ltd.
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OKADA Masaru
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga K
Kobe Univ. Kobe Jpn
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Otsuka M
Sumita Optical Glass Inc.
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SAKASHITA Yukio
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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MIYAJIMA Masaki
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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SAKASHITA Yukio
Nippon Mining Co.
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SEGAWA Hideo
Nippon Mining Co.
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Miyajima Masaki
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Sakashita Yukio
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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