Switching and Fatigue Characteristics of (Pb,La)(Zr,Ti)O_3 Thin Films by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Lanthanum-modified lead zirconate titanate (PLZT) thin films (O.3〜O.4 μm) have been prepared on Pt/SiO_2/Si substrates at 650℃ by the metal-organic chemical vapor deposition (MOCVD) method. The electrical properties of the films were examined as a function of lanthanum content. The relative dielectric constants increased as the La content increased to about 5 at% , and beyond this value, it became constant at 600. The remanent polarization and coercive field decreased from 22 to 1 μC/cm^2 and from 90 to 20 kV/cm with increasing La content in the range of 0〜11 at%, respectively. The leakage current density decreased considerably with the addition of La, and was 8×10^<-9> A/cm^2 at an applied voltage of 5 V. The switched charge densities of PLZT films showed almost no change up to switching cycles of 1×10^<12> at a bipolar pulse of ±5 V.
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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OKADA Masaru
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Kouji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Takagi Takeshi
Department Of Ophthalmology Akita University School Of Medicine
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SHIRAYANAGI Atsuhiro
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Shirayanagi Atsuhiro
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Takagi Takeshi
Department Of General And Cardiothoracic Surgery Kanazawa University
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Takagi Takeshi
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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