Preparation of (111)-Oriented β-Ta_2O_5 Thin Films by Chemical Vapor Deposition Using Metalorganic Precursors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-05-01
著者
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Kobayashi Izumi
Department Of Electro And Electronics Engineering Nippon Institute Of Technology
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Okada Morihiro
Advanced Materials & Technology Research Laboratories Nippon Steel Corporation
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Okada M
Nagoya Univ. Nagoya Jpn
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories:(present Address) Sanyo Electric Co. Ltd.
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Tominaga Koji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Koji
Semiconductor Research Center Sanyo Electric Co. Ltd.
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OKADA Masaru
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Okada M
Faculty Of Science And Engineering Ritsumeikan University
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga K
Kobe Univ. Kobe Jpn
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Otsuka M
Sumita Optical Glass Inc.
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Kobayashi I
Nippon Sanso Corp. Ibaraki Jpn
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MUHAMMET Rusul
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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KOBAYASHI Ichizo
Kawasaki Laboratory, Nippon Sanso Corp.
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Muhammet Rusul
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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MUHAMMET Rusul
Department of Electrical Engineering, Nagaoka University of Technology
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