Synthesis of Ti(DPM)_2(OCH_3)_2 and Evaluation of the TiO_2 Films Prepared by Metal-Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-09-30
著者
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Shimizu Hisashi
Department of Cardiology, Kyorin University School of Medicine
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Shimizu Hisashi
Department Of Cardiology Kyorin University School Of Medicine
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Shimizu Hisashi
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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ANDO Fumio
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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KOBAYASHI Ichizo
Tsukuba Laboratory, Nippon Sanso Corporation
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OKADA Masaru
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Ando Fumio
Department Of Applied Chemistry
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Ando Fumio
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Kobayashi Ichizo
Tsukuba Laboratories Nippon Sanso Corporation
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