Metalorganic Chemical Vapor Deposition of c-Axis Oriented PZT Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-04-20
著者
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Okada M
Nagoya Univ. Nagoya Jpn
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Araki Tohru
Department Of Chemistry Faculty Of Science Saitama University
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories
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Tominaga Koji
Atr Optical And Radio Communications Research Laboratories:(present Address) Sanyo Electric Co. Ltd.
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Tominaga Koji
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga Koji
Semiconductor Research Center Sanyo Electric Co. Ltd.
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OKADA Masaru
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Araki T
Department Of Chemistry Faculty Of Science Saitama University
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Tominaga K
Kobe Univ. Kobe Jpn
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Otsuka M
Sumita Optical Glass Inc.
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ARAKI Teruhiko
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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KATAYAMA Shigehisa
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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SAKASHITA Yukio
Department of Industrial Chemistry, Faculty of Engineering, Chubu University
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Katayama Shigehisa
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Sakashita Yukio
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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