Preparation and Pyroelectric Characteristics of Pb(Zr, Ti)O3 Thin Films Grown by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Highly (001), (110) and (111)-oriented lead zirconate titanate (PZT) thin films with a thickness of 2 µ m were grown on Pt(100)/MgO(100), RuO2(110)/MgO(100) and Pt(111)/SiO2/Si(100) substrates, respectively, by metalorganic chemical vapor deposition. The pyroelectric properties of these films were investigated in relation to application to infrared sensors. Pyroelectric currents were detected on three differently oriented films without poling treatment. Pyroelectric coefficients of (001), (110) and (111)-oriented films were 3.0, 1.0 and 0.5×10-8 C/cm2· K, respectively, due to strong dependence on their crystalline orientations. With poling treatment, these values were increased and attained values 3 times as large as those of as-grown films for (111)-oriented films.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1996-09-30
著者
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Sato Atushi
Department Of Health Science Faculty Of Human Life And Environmental Science Kochi Women's Univ
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Okada Masaru
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Asakura Takao
Department Of Industrial Chemistry Faculty Of Engineering Chubu University
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Ishikawa Koji
Department Of Biological Functions And Engineering Graduate School Of Life Science And Systems Engin
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Sato Atushi
Department of Industrial Chemistry, Faculty of Engineering, Chubu University,
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