AIN Film Preparation on Glass by Sputtering System with Facing Targets : T: THIN FILM

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On the Anomally of Resistance in Reduced BaTiO_3 Crystal
Film Degradation in AlN Preparation by Facing Target System ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
Energetic Oxygen Atoms in RF Sputtering of ZnO : T: Thin Film
High-Energy Oxygen Atoms in ZnO Film Preparation by Reactive Sputtering of Zn : T: Thin Film
Influence of Energetic Oxygen Bombardment on Conductive ZnO Films
Energy Distribution of Energetic Oxygen Atoms in the Sputtering of ZnO
Mean Free Path of Energetic Oxygen Atoms in the Sputtering of ZnO
High-Energy Particles in AIN Film Preparation by Reactive Sputtering Technique
Influence of Bombardment by Energetic Atoms on c-Axis Orientation of ZnO Films
Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO_3
High-Energy Neutral Atoms in the Sputtering of ZnO
AIN Film Preparation on Glass by Sputtering System with Facing Targets : T: THIN FILM
Influence of Energetic Particles on ZnO Films in the Preparation by Planar Magnetron Sputtering with Obliquely Facing Targets
Damage in ZnO Film Preparation by Planar Magnetron Sputtering System with Obliquely Facing Targets of Zn
AlN Sputtered Film Properties Prepared at Low Gas Pressures by Facing Target System
Time-of-Flight Measurement of Particles in SiO_2 Sputtering
Growth of BaTiO_3 Crystals by Floating Zone Technique
Influence of Target Shape on Properties of AlN Sputtered Film
Gas Pressure Dependence of AIN Film Properties in Alternating Sputtering System
Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films(Materials Evaluation by X-ray and Neutron Diffractions)
Radiation Effect due to Energetic Oxygen Atoms on Conductive Al-Doped ZnO Films : Surfaces, Interfaces and Films
Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

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