Gas Pressure Dependence of AIN Film Properties in Alternating Sputtering System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-09-30
著者
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MORI Ichiro
Faculty of Engineering, The University of Tokushima
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KUSAKA Kazuya
Faculty of Engineering, The University of Tokushima
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Mori I
Faculty Of Engineering The University Of Tokushima
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Kusaka Kazuya
Department Of Mechanical Engineering Tokushima University
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Hanabusa T
Department Of Mechanical Engineering Tokushima University
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Hanabusa Takao
Faculty Of Engineering Tokushima University
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Tominaga Kikuo
Dept. Of Electrical And Electronic Engineering Tokushima Univ.
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Tominaga Kikuo
Faculty Of Engineering The University Of Tokushima
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AO Takahiro
Faculty of Engineering, The University of Tokushima
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Ao Takahiro
Faculty Of Engineering The University Of Tokushima
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Mori Ichiro
Faculty Of Engineering Osaka University
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