Statistics of Kinetic Secondary Electron Emission with Stochastic Elastic Collision of Ions in Solids
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概要
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Electron emission statistics for H^+ impact on Au in the energy range 1 keV-40 keV are investigated using a Monte Carlo calculation with the kinetic emission model. The factor f_0/ε evaluated by fitting the calculation to experimental electron yield increases with increasing impact energy, and it approaches an energy-independent value as recognized by many investigators because of the decrease of large-angle elastic scattering of H^+ in Au (f_0 : the transmission probability through the surface, ε: the average energy deposited to produce an electron). Special features of the emission statistics are a large probability to produce no electron for keV energy, a smaller probability for no electron with increasing energy, and higher (lower) yield than the inverse cosine law for tens keV (keV) with oblique incidence.
- 社団法人応用物理学会の論文
- 1991-05-15
著者
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Ohya Kaoru
Faculty Of Engineering The Universiry Of Tokushima
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Mori Ichiro
Faculty Of Engineering Osaka University
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