Influence of Backscattered Particles on Angular Dependence of Secondary Electron Emission From Copper
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概要
- 論文の詳細を見る
Dependences of secondary electron emission of copper bombarded by an electronand an ion on the angle of incidence are investigated for the bombarding energiesfrom 100 eV to 1 MeV, using a Monte Carlo simulation of the kinetic emission. Theinverse cosine of the angle measured from the normal to the surface overestimates theangular dependence for low energy, and underestimates for intermediate energy;then, with further increasing energy, the angular dependence approaches the inversecosine. The two types of secondary electron emission are distinguished by usingdistributions of secondary electrons produced by the incident particle with each trajec-tory: one is the emission due to particles that stop in the copper, and the other is thatdue to backscattered particles that finally escape from the surface. The backscatteredparticles cause the angular dependence to deviate from the inverse cosine.
- 社団法人日本物理学会の論文
- 1990-04-15
著者
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Ohya Kaoru
Faculty Of Engineering The Universiry Of Tokushima
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Mori Ichiro
Faculty Of Engineering Osaka University
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MORI Ichoro
Faculty of Engineering,The University of Tokushima
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Mori Ichoro
Faculty Of Engineering The University Of Tokushima
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