Monte Carlo Study of Dependence of Secondary Electron Emission from Copper on Incident Angle of keV Primary Electrons

概要

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The dependence of secondary electron emission from copper on the incident angleof the keV primary electron is investigated by using Monte Carlo techniques not onlyfor the collision process of the primary electron in material, but also for that of thesecondary electron, the 'cascade' process. The energy dependence of the secondaryelectron yield largely changes with the incident angle, while the energy and angulardistributions of secondary electrons emitted in vacuum are rather insensitive to theangle, which is consistent with some experimental results. The cascade processreduces the dependence of secondary electron yield on the incident angle, whichvaries as an inverse cosine of the angle measured from the normal to the surface forhigh energy, although the effect of the cascade process is smaller than that of the collision process of the primary electron for keV energy.
社団法人日本物理学会の論文
1990-06-15