Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes
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概要
- 論文の詳細を見る
- 2003-06-01
著者
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Ohya Kaoru
Department Of Electrical And Electronic Engineering Faculty Of Engineering The University Of Tokushi
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Ishitani Tohru
Naka Division Design And Manufacturing Group Hitachi High-technologies Corporation
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Ishitani Tohru
Naka Division. Hitachi High-technologies Corporation
関連論文
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- Comparative Study of Secondary Electron Emission from Tungsten and Beryllium Irradiated by Plasmas
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- Calculation of Incident Angle Dependence of Ion-Induced Kinetic Electron Emission from Aluminum
- Direct Monte Carlo Simulation of Incident-Angle Dependence of Secondary Electron Emission from Aluminum
- A Monte Carlo Simulation of Ion-Induced Kinetic Electron Emission with a Stochastic Excitation of Electrons in Solids
- Elastic Scattering Cross Sections of Low-Energy Electron in Solids
- Influence of Recoiling Target Atoms on Kinetic Electron Emission from Molybdenum under keV Ion Bombardments
- Incident Angle Dependence of Secondary Electron Emission from Copper with Multiple Elastic Scattering of Primary Electron in the Muffin-Tin Potential
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- Monte Carlo simulation of topographic contrast in scanning ion microscope
- A Semiempirical Monte Carlo Approach to Secondary Electron Emission from a Hydrogen-Implanted Carbon Surface
- Influence of Wall Material on Charge-Exchange Neutral Emission from High-Temperature Hydrogen Plasma
- Secondary Electron Emission from a Hydrogen-Implanted Graphite by Low-Energy Electron Impact
- Axial Profile of Balmer-Alpha Emission near a Tungsten Target in the Compact PWI Simulator APSEDAS
- Receiving Characteristics of d_-zero Piezo-Rubber Hydrophone
- Elastic Scattering of Low-Energy Electrons, Positrons and Protons in Copper
- Receiving Characteristics of Piezo-Rubber Transducers : Ultrasonic Transduction
- Hydrostatic Pressure Properties of Piezoelectric Flexible Composites : Ultrasonic Transduction
- Piezoelectric and Acoustic Properties of Piezoelectric Flexible Composites : SAW and BAW Materials, Devices and Theories
- Dynamic Simulation of Erosion and Deposition of a Tungsten Surface Due to High-Fluence Bombardment of Carbon Ions in Plasmas
- Surface Roughness Effect on Secondary Electron Emission from Beryllium under Electron Bombardment
- Improvements in performance of focused ion beam cross-sectioning : aspects of ion-sample interaction
- Secondary Electron Emission from Beryllium under Electron and Proton Bombardment at keV Energy
- Secondary Electron Emission from Rough-Textured Beryllium Surface under Oblique Incidence of Low-Energy Electrons
- Contrast-to-gradient method for the evaluation of image resolution taking account of random noise in scanning electron microscopy
- Monte Carlo Simulation of Kinetic Electron Emission from a Metal Surface under keV Heavy Ion Bombardment
- Simulation study on image contrast and spatial resolution in helium ion microscope
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- Contrast-to-gradient method for the evaluation of image resolution in scanning electron microscopy
- Origins of material contrast in scanning ion microscope images
- Monte Carlo Approach to Secondary Electron Emission from Rough Surfaces of Beryllium
- Dependence of Secondary Electron Emission on the Incident Angle and the Energy of Primary Electrons Bombarding Bowl-Structured Beryllium Surfaces
- Influence of Surface Roughness on Secondary Electron Emission and Electron Backscattering from Metal Surface
- Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes