Improvements in performance of focused ion beam cross-sectioning : aspects of ion-sample interaction
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概要
- 論文の詳細を見る
- 2004-10-01
著者
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ISHITANI Tohru
Naka Division, Hitachi High-Technologies Corporation
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Kamino Takeo
Naka Application Center Hitachi High-technologies Corporation
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YAGUCHI Toshie
Hitachi High Technologies Corp.
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KATO Takeharu
Japan Fine Ceramics Center
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Kamino T
Naka Application Center Hitachi High-technologies Corporation
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Ishitani T
Semiconductor Energy Lab. Co. Ltd. Kanagawa Jpn
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Ishitani T
Central Research Laboratory Hitachi Ltd
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Yaguchi T
Hitachi Instruments Engineering Co. Ltd. Ibaraki Jpn
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UMEMURA Kaoru
Naka Division, Hitachi High-Technologies Corporation
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OHNISHI Tsuyoshi
Naka Division, Hitachi High-Technologies Corporation
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YAGUCHI Toshie
Naka Customer Center, Hitachi Science Systems, Ltd
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Umemura Kaoru
Naka Division Hitachi High-technologies Corporation
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Ohnishi Tsuyoshi
Naka Division Hitachi High-technologies Corporation
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Ishitani Tohru
Naka Division Hitachi High-technologies Corporation
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Ishitani Tohru
Naka Division Design And Manufacturing Group Hitachi High-technologies Corporation
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