Evaluation of Internal Stresses in Single-, Double- and Multi-Layered TiN and TiAIN Thin Films by Synchrotron Radiation(<Special Issue>Advanced Technology of Experimental Mechanics)

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概要

• 論文の詳細を見る

• Residual stresses in TiN and TiAlN films on steel substrate were investigated by ultra high X-rays of synchrotron radiation. The specimens prepared in this study were single-, double- and multi-layer TiN and TiAlN films deposited on high speed steel substrate by arc-ion plating. The minimum thickness available for the residual stress measurement was 0.8μm by in-lab equipment whereas below 0.1μm by synchrotron radiation. Extremely large compressive residual stresses were found in the films. Residual stresses in TiAlN films were more than twice larger than those in TiN films, resulting to reduce the average residual stress in the whole film system by making double- or multi-layer film construction comparing to that in the single TiAlN film.

• 一般社団法人日本機械学会の論文
• 2004-07-15

著者

• Sakata Osami

  Experimental Facilities Division Japan Synchrotron Radiation Research Institute

• Sakata Osami

  Japan Synchrotron Research Institute

• Sakata Osami

  Japan Synchrotron Radiation Research Institute (jasri)

• Sakata Osami

  Japna Synchrotron Radiation Research Institute

• Sakata Osami

  Spring-8

• Hanabusa Takao

  Department of mechanical engineering, The University of Tokushima

• NISHIDA MASAYUKI

  Department of Cardiovascular Medicine Hokkaido University School of Medicine, Sapporo, Japan

• Kusaka Kazuya

  Department of General Medicine, Kanazawa Medical University

• Kusaka Kazuya

  Department Of Mechanical Engineering Tokushima University

• Kusaka Kazuya

  Department Of General Medicine Kanazawa Medical University

• Hanabusa T

  Department Of Mechanical Engineering Tokushima University

• Hanabusa Takao

  Department Of Mechanical Engineering The University Of Tokushima

• MATSUE Tatsuya

  Department of Material Engineering, Niihama National College of Technology

• SATO Toshiki

  Materials Research Laboratory, Kobe Steel Ltd.

• Sato Toshiki

  Materials Research Laboratory Kobe Steel Ltd.

• Matsue Tatsuya

  Department Of Material Engineering Niihama National College Of Technology

• Nishida Masayuki

  Department Of Mechanical Engineering Kobe City College Of Technology

• Nishida Masayuki

  Department Of Cardiovascular Medicine Hokkaido University School Of Med

• Nishida M

  Department Of Aeronautics And Astronautics Kyushu University

• Sakata O

  Experimental Facilities Division, Japan Synchrotron Radiation Research Institute

• Sato T

  Materials Research Laboratory, Kobe Steel Ltd.

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