X-Ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing

概要

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Tin coatings on cutting tools have greatly succeeded in prolongation of tool lives.In the present study, TiN film deposition was tried on a surface of aluminum and aluminum alloy substrates by means of an arc ion plating(AIP)method and an ion beam mixing(IBM)method.The aim is to develop aluminum-based materials having strong wear resistance.In order to examine the hardness and residual stress of TiN films, the bias the voltage and N_2 gas pressure were varied in the AIP treatment and the titanium deposition rate was changed in the IBM treatment.Vickers hardness test revealed high values(HV=1800〜2400).The TiN films coated by the AIP and the IBM methods exhibited very high {111}and{110}preferred orientations, respectively.The two-exposure X-ray stress measuring method was used to measure residual stresses in the TiN film.Large compressive residual stresses of -6.3〜-2.3 GPa were deveoped at lower N_2 gas pressures for the AIP method and at higher Ti deposition rates for the IBM method.A wear experiment was also made with a ball-on-disk type wear testing machine.The depth and the width of wear traces on the surface of specimens were greatly reduced when TiN coatings were applied.
社団法人日本材料学会の論文
2000-12-15